How to analyse comb electrodes used in MEMS accelerometers with MAPDL.

- November 29, 2023 at 9:57 am
  
  ty_jpn
  Subscriber
  
  Hello
  I've asked this question before but I can't get it to work ...
  
  I want to perform an electrostatic field analysis by modelling comb electrodes only.
  
  thankyou
  
  ty_jpn
- November 30, 2023 at 6:28 pm
  
  danielshaw
  Ansys Employee
  
  Do you want to do an electrostatic analysis or an electrostatic-structural analysis? If you want to do an electrostatic analysis, then you need to model the air around the comb using electrostatic elements (e.g., SOLID122) to calculate the electric field and maybe CMATRIX to extract the capacitance. If you want to do an electrostatic-structural analysis, you could use the coupled-field 22x elements, but you might want to consider using the TRANS126 element. TRANS126 was originally designed to model comb drives. You should review Section 2.9 in the MAPDL Coupled-Field Analysis Guide.
  - November 30, 2023 at 7:48 pm
    
    ty_jpn
    Subscriber
    
    I want to carry out electrostatic analysis. Are there any simple sample codes available?