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May 22, 2025 at 1:23 pm
gs01365
SubscriberHello,
I am simulating an RF inductively coupled plasma in Fluent. I have the fluid flow working as expected and have extracted the B field from Ansys Maxwell and got it to import in the correct format. What I am struggling with is the fact that the AC frequency is 13.56 MHz which results in a tiny time step and a large mismatch in the time scales of the fluid evolution and the EM fields. Does the MHD module have any capability to work in the frequency domain and give averaged Lorentz force, Joule heating etc? I did notice that it does solve in steady state, but I am unsure how this is working?
Or is there a better way to approach this (UDFs etc)?
Thank you,
George.Â
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May 27, 2025 at 4:20 pm
Adam Anderson
Ansys EmployeeÂ
The high frequency field at RF ranges is well outside the range of applicability of Maxwell.
You need to use HFSS to get the physics, such as skin effect, captured correctly.
Then you need to either calculate the DC component of the Lorentz force in HFSS and send that to Fluent or get the E and H fields from HFSS and calculate the Lorentz force (and heating) in Fluent.
But, you then need to pass the conductivities of your plasma back to HFSS so it can calculate the fields properly for the new shape/state of the plasma.If you contact your local Ansys support team, they will direct you to the best options for your particular problem.
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