Is there any example of Diffraction Based Overlay (DBO) metrology FDTD simulation in Lumerical?
September 25, 2023 at 6:58 pm
Guilin Sun
Ansys Employee
We do not use such terminology in Lumerical FDTD. FDTD has the results users select by proper monitors and can do post processes needed, such as grating analysis and far field projection.
If you can let us know exactly what you want we may provide further help.
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