1)_I would like to use the S matrix calculation method to simulate defects. I referred to another topic "Optical-Defect-Metrology-S-Matrix", but that optical imaging is mainly based on a scanning spot. So I am trying to modify it to a standard image calculation method, and researching how to write the script and looking for related articles.
2)_If lines 172~175 are not Ex,Ey. What is the input_factor0_(xS, xP, yS, yP) mean? I thought that is transform matrix between Es, Ep and Ex, Ey.
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