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Ansys Learning Forum › Forums › Discuss Simulation › General Mechanical › How to analyse comb electrodes used in MEMS accelerometers with MAPDL. › Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL.

November 30, 2023 at 6:28 pm
danielshaw
Ansys Employee

Do you want to do an electrostatic analysis or an electrostatic-structural analysis?  If you want to do an electrostatic analysis, then you need to model the air around the comb using electrostatic elements (e.g., SOLID122) to calculate the electric field and maybe CMATRIX to extract the capacitance. If you want to do an electrostatic-structural analysis, you could use the coupled-field 22x elements, but you might want to consider using the TRANS126 element.  TRANS126 was originally designed to model comb drives.  You should review Section 2.9 in the MAPDL Coupled-Field Analysis Guide.