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On-chip inductor design

- September 21, 2024 at 11:38 am
  
  saman.mokhtabadamri
  Subscriber
  
  Hello everyone,
  This is my first on-chip inductor design in HFSS software using the CMOS process. My layers' stack order is as follows (from bottom to top) :
  Substrate > Contact 0 > Poly > Contact 1 > Metal 1> Via 1 > ..... >Metal 8> Via 8> Metal 9.
  
  My inductor is on the M9 layer and I want to have ground on the M1 layer.
  However, I have a problem with the ground shield setup.
  1) How can I connect my ground shield to the ground?
  2) Should all guard ring layers (as shown in picture, M1-M9) connect to the ground?
  3) Should all my layers be in the same shape as the ground ring?
- October 31, 2024 at 6:41 pm
  
  Rong Liu
  Ansys Employee
  
  HI, Saman,
  
  If you can file a support case in the Ansys Customer Support Portal, it will be easier to help you.
  
  Best regards,
  Rong

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