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Electronics

Electronics

Topics related to HFSS, Maxwell, SIwave, Icepak, Electronics Enterprise and more.

On-chip inductor design

    • saman.mokhtabadamri
      Subscriber

      Hello everyone,
      This is my first on-chip inductor design in HFSS software using the CMOS process. My layers' stack order is as follows (from bottom to top) :
      Substrate > Contact 0 > Poly > Contact 1 > Metal 1> Via 1 > ..... >Metal 8> Via 8> Metal 9.

      My inductor is on the M9 layer and I want to have ground on the M1 layer.

      However, I have a problem with the ground shield setup.
      1) How can I connect my ground shield to the ground? 
      2) Should all guard ring layers (as shown in picture, M1-M9) connect to the ground?

      3) Should all my layers be in the same shape as the ground ring?

       

    • Rong Liu
      Ansys Employee

      HI, Saman, 

       

      If you can file a support case in the Ansys Customer Support Portal, it will be easier to help you.

       

      Best regards,

      Rong

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