Learning Forum

[saman.mokhtabadamri]

Hello everyone,
This is my first on-chip inductor design in HFSS software using the CMOS process. My layers' stack order is as follows (from bottom to top) :
Substrate > Contact 0 > Poly > Contact 1 > Metal 1> Via 1 > ..... >Metal 8> Via 8> Metal 9.

My inductor is on the M9 layer and I want to have ground on the M1 layer.

However, I have a problem with the ground shield setup.
1) How can I connect my ground shield to the ground? 
2) Should all guard ring layers (as shown in picture, M1-M9) connect to the ground?

3) Should all my layers be in the same shape as the ground ring?