TAGGED: #hfss-#lumped_sources
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September 21, 2024 at 11:38 am
saman.mokhtabadamri
SubscriberHello everyone,
This is my first on-chip inductor design in HFSS software using the CMOS process. My layers' stack order is as follows (from bottom to top) :
Substrate > Contact 0 > Poly > Contact 1 > Metal 1> Via 1 > ..... >Metal 8> Via 8> Metal 9.
My inductor is on the M9 layer and I want to have ground on the M1 layer.However, I have a problem with the ground shield setup.
1) How can I connect my ground shield to the ground?Â
2) Should all guard ring layers (as shown in picture, M1-M9) connect to the ground?3) Should all my layers be in the same shape as the ground ring?
Â
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October 31, 2024 at 6:41 pm
Rong Liu
Ansys EmployeeHI, Saman,Â
Â
If you can file a support case in the Ansys Customer Support Portal, it will be easier to help you.
Â
Best regards,
Rong
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