Learning Forum

[d08941008]

Hello, I noticed that there's a script file mentioned in the demo of Waveguide Bragg Grating (https://www.lumerical.com/learn/video/waveguide-bragg-gratings-and-resonators/) to modify the grating structure considering the Fraunhofer effect of lithography . But I can't find this file in the application gallery zone. Could you please tell me where to download it? Thanks.

[Taylor Robertson]

Hello RyanChung The files are associated with the lithography update are available under the Photolithography video. https://www.lumerical.com/learn/video/photolithography-simulation/.
Lumerical offers some capabilities in photolithography simulation. Our model is mainly based on Fraunhofer diffraction at the photomask, where the mask is assumed to be a very thin metal without plasmonic or polarization effects. It allows users to simulate the photolithography effects by defining some key inputs Photomask (the desired geometries)
Projection NA
Spatial coherence factor
Resist threshold
which represent some key elements in a photolithography simulation, such as the illumination optics, photomask, projection optics, and photoresist.
The following steps are used to run a photolithography simulation in Lumerical
Create/import the structure, which will be used as the photomask
Input the photolithography parameters
Run the script file for photolithography simulation and generate the new structure

The following resources should cover you.
Recorded videos:
Photolithography Simulation
Subwavelength Grating Bandstructure
Related articles:
Photolithography
Bragg Gratings

[Akram Akrout akram.akrout]

Once simulating the impact of Photolithography and after generating the GDS file, how to find the transmission spectrum of the initial design and the one with Photolithography effect?
In EME we can visualize be sweeping wavelength, however in the example it is an FDTD.