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Titanium Evaporation

    • Chungryeol Chun
      Subscriber

      Hi,

      I am trying to evaporate titanium (solid) to create a digital model of an evaporator, which is used for deposition of material onto wafers. (PVD e-beam Evaporator)

      1. Can I do this in Fluent using the multiphase model?

      2. I do not see titanium in the fluid material database. Is it possible to use melted titanium solid (through Solidifcation & Melting) then make the melted titanium evaporate?

      Let me know if you need additional information.
      Any sort of guidance would be greatly appreciated. Thank you.

    • Rob
      Forum Moderator

      You can, but trying to include everything is going to be computaionally very expensive so think carefully on the goals of the model and therefore what you really need as opposed to think you want. 

      What Knudsen Number range are you operating in, and how does that compare to the continuum assumption requirements of CFD codes? 

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