Question about article “Optical Defect Metrology (S-Matrix)”

- August 15, 2024 at 9:17 am
  
  johnny_hsiao
  Subscriber
  
  In the script "build_S_matrix_sram.lsf". Why does the equation need to be multiplied by 1i?
  The comment said "1i from diffraction". But I still don't understand. Thanks.
- August 15, 2024 at 3:35 pm
  
  Guilin Sun
  Ansys Employee
  
  This is for phase correction of the fields. It will not be correct without this phase correction.
- August 16, 2024 at 8:07 am
  
  johnny_hsiao
  Subscriber
  
  So that is a phase shift of $π/2$ between the incident and diffracted wave. Is that right? Thanks~
- August 16, 2024 at 4:47 pm
  
  Guilin Sun
  Ansys Employee
  
  yes.
  If you check the Rayleigh-Sommerfeld Diffraction Integral, you will find it has a -i phase. it is forward. Now we are correcting the phase backward. I hope this helps.