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General Mechanical

General Mechanical

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  3. MEMS electrothermal V-shaped actuator simulation

MEMS electrothermal V-shaped actuator simulation

    • April 14, 2025 at 4:02 pm
      ngocminh2532003
      Subscriber

      Hi all,
      I am doing a MEMS electrothermal actuator on Ansys. I obtained a displacement of 40.2um at an applied voltage of 20V, but my theoretical calculation gives only ~23um. Could someone check if I made a mistake in the simulation using the file in the Google Drive link below?

      https://drive.google.com/drive/folders/1OunnqqCj12gI1_hSUU6NcaBrFhN7c8B6?usp=sharing

      Thank you
      Minh

    • April 15, 2025 at 6:46 am
      Erik Kostson
      Ansys Employee

       

       

       

       

      Hi,

      Ansys employees cannot download files.

      One advice that should resolve this is to: 

      turn ON Large Deflection if they are OFF in the static structural analysis (under analysis settings – https://innovationspace.ansys.com/product/large-deformation/) – 

      also use more sub-steps (see here for sub steps: https://www.padtinc.com/2011/11/08/you-dont-wanna-step-to-this-breaking-down-loadsteps-and-substeps-in-ansys-mechanical/)

      All the best,

      Erik

       

       

       

       

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