TAGGED: ansys-fluent, ar-plasma, mhd-model, vacuum, vacuum-chamber
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May 6, 2021 at 11:28 am
aerorocker
SubscriberI am trying to insert plasma argon inside a vacuum chamber. The ultimate goal is to find the gradient in the coating thickness of the plasma onto the holder that is placed inside the chamber. I am using Fluent to solve this. But I can not figure out how to define plasma argon as my fluid ( I only found ar, ar+, and ar-liquid in the fluent library). Should I use UDF to define the plasma argon?
May 6, 2021 at 11:59 amAmine Ben Hadj Ali
Ansys EmployeeNavier-Stokes cannot deal with Vaccum but only near vaccum conditions: read more about Knudsen and continuous formulation.
Plasma is the 4th state if one can use that word to describe a completely ionized fluid at high temperature. You need to adjust the material properties: Plasma is general defined a mixture of components, account for reactions, radiations, etc..
More on plasma can be found here: https://www.plasma-universe.com/plasma-classification-types-of-plasma/
May 7, 2021 at 1:18 pmaerorocker
SubscriberActually, our system has three turbomolecular pumps to achieve vacuum conditions. The ideal pressure when we normally use the operation is approx 8x10^-9 mbar. Is Navier stokes applicable at this pressure?
May 7, 2021 at 1:31 pmRob
Forum ModeratorTo an extent it'll depend on the domain scale: read up on continuum theory and the Knudsen Number.
November 29, 2022 at 10:35 amA B
SubscriberHi Aerorocker I'm trying to simulate a similar problem in a PVD reactor. I've done some simulations. Is it possible to discuss and exchange some ideas? please feel free to send me an email or a zoom link or another contact.Viewing 4 reply threads- The topic ‘How to simulate Plasma Argon using Ansys Fluent?’ is closed to new replies.
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