Learning Forum

[Mohammad Okour]

Hi all,

I just started using Ansys two days ago and i want to simulate a simple cantilever MEMS, I tried to use Couple Field Harmonic , i am not sure if i am doing the right steps for that, i started with defining a material for both the cantilever and the fixed substrate and i used Silicon for these two bodies, then i generated the mesh, then for the solution, i started by defining the boundary condition, for the cantilever i made it fixed from one side and for the bottom face i used displacement and i added a voltage for this face with a value of 100V, then for the fixed substrate i also made it fixed from one side, and for the upper face i added a ground voltage for that side, then i solve the problem.

for the deformation it just keep showing me 0 min to 0 max and i dont know what's wrong with my work.

[ErKo]

Hi

See the Coupled field analysis Guide in the Ansys help manual for a similar example called:

2.4.4. Example: Electrostatic-Structural Analysis of a MEMS Switch

 

All the best

Erik

[Mohammad Okour]

i run that example, but its not exactly what i am looking for, i want to understand what i am doing wrong with the image that i attached?

i have two bodies and i applied a voltage between them and chose a face to deflect in a certin direction, why when i apply whatever voltage value the deformation keeps 0 at all cases?

It just i want to know what i am doing incorrectly.

Thanks