Ansys Learning Forum › Forums › Discuss Simulation › General Mechanical › Electrostatic MEMS Simulation using Couple Field Harmonic › Reply To: Electrostatic MEMS Simulation using Couple Field Harmonic
July 26, 2024 at 6:10 am
Erik Kostson
Ansys Employee
Hi
See the Coupled field analysis Guide in the Ansys help manual for a similar example called:
2.4.4. Example: Electrostatic-Structural Analysis of a MEMS Switch
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All the best
Erik