Ansys Learning Forum Forums Discuss Simulation General Mechanical Electrostatic MEMS Simulation using Couple Field Harmonic Reply To: Electrostatic MEMS Simulation using Couple Field Harmonic

Erik Kostson
Ansys Employee

Hi

See the Coupled field analysis Guide in the Ansys help manual for a similar example called:

2.4.4. Example: Electrostatic-Structural Analysis of a MEMS Switch

 

All the best

Erik