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Ansys Learning Forum Forums Discuss Simulation General Mechanical Electrostatic MEMS Simulation using Couple Field Harmonic Reply To: Electrostatic MEMS Simulation using Couple Field Harmonic

ErKo
Ansys Employee

Hi

See the Coupled field analysis Guide in the Ansys help manual for a similar example called:

2.4.4. Example: Electrostatic-Structural Analysis of a MEMS Switch

 

All the best

Erik

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