Reply To: Coherence scanning interferometer signal simulation via Ansys Lumerical

[huyhoang.chu]

Hello,

Thank you for your message.

What I aim to do is model the Coherence Scanning Interferometer using Lumerical.

In this setup, white light is divided into two paths by a beam splitter. One path goes to the reference mirror, which I intend to represent as PEC (Perfect Electric Conductor) material, and the other path goes to the sample. Due to the low coherence of white light, the two beams will only interfere when the optical path difference between them is nearly zero.

The signal I provided indicates the intensity values when the mirror is scanned. The signal shows that at the reference mirror position around 50 µm, the intensity is highest, which means the optical path difference between the reference beam and the measurement beam is almost zero.

My idea is to configure the optical setup in Lumerical similar to the figure above, scan the reference mirror, and record the intensity when the two beams combine at each discrete scanning distance.

I hope this helps clarify my request.

Thank you.