"The problem is that I cannot get a correct result till I define nz'=nz, and ny'=ny, exchanging y and z axis basically. I am confused to this result. "
I am not sure if this is what you really mean. Maybe ny'=nz, and nz'=ny?
I would suggest that you use thin-film type structure and use stackrt for verification stackrt - Script command which is an analytical solution. Then you can compare it with results from FDTD and RCWA.
For further questions, please post it in the Photonics forum: /forum/forums/forum/discuss-simulation/photonics/
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