Amrita Pati
Ansys Employee

Hi Shany,

Is there any chance you are using a polarization other than s or p? I believe the grating s parameters analysis group can only handle s and p-polarized sources. So, if the "polarization angle (degrees)" field in the plane wave source is anything other than 0 (p-polarized) and 90 (s-polarized) then the analysis group will most likely give you inaccurate results. 

Regards,
Amrita