Break the problem down into pieces. There won't be a tutorial covering every model combination as we'd run out of space to store them.... It's also (usually) easier to troubleshoot problems with less physics - there are less options to try and understand.Â
Get rid of the VOF and solve the single phase conjugate heat transfer problem. How are you setting the initial wafer temperature? Does that heat transfer to the fluid? I assume you did split the wafer volume out of the larger domain & then share topology?Â
Do a couple of VOF tutorials to see how that works. Decide how you want the boundary conditions to apply to your wafer box.Â
Once you're happy with both of these models turn them both on. How hot is the wafer relative to the liquid boiling point?Â