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General Mechanical

General Mechanical

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MEMS electrostatic comb-drive actuator simulation

    • April 4, 2025 at 4:00 pm
      ngocminh2532003
      Subscriber

      Hello,
      I am preparing for a project that requires MEMS electrostatic comb-drive actuator simulation (figure below). I know that a coupled field static system can be used, but I have no idea anymore. Could someone guide me through the implementation steps or provide me with a tutorial or reference materials?
      Thank you,
      Ngoc Minh

    • April 4, 2025 at 4:24 pm
      ErKo
      Ansys Employee

      Hi

      See my previous post (first question you posted).

      All the best

      Erik

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