Reply To: How to determine the position of DFT monitor on farfield scattering analysis ?

[takuya.sobue]

 

 

 

 

 

 

 

 

 

Thank you. By the way, if I set the monitor behind the TFSF source, and if I set the monitor in front of the plane wave source and extract only the reflected components, I should theoretically get the same result except for very low numerical aperture region.
But in the latter case, when I tested with only sphere structure(no substrate), far field was like a cross mark, even with or without scatterers. What causes it?

p.s. I used bloch boundary condition in x and y boundaries. I tried expanding simulation region gradually(~10um), The above phenomena became smaller. Even though, the signal of cross mark much larger than defect signal. So in my opinion, it’s impossible to conduct appropriate simulation by using plane wave. However, some templates (ex. Optical defect metrology (s-matrix)) adopts relatively small region (2.16um), why is it not problem?