Reply To: RCWA – extracting the phase of the reflected light

[Guilin Sun]

You can use script to get grating characterization. and the result:

gc=getresult("RCWA","grating_characterization");

Rss=gc.Rss;

etc

are actually the amplitude results, S parameters similar to Fresnel coefficients. They are complex and has the phase you need.

https://optics.ansys.com/hc/en-us/articles/12959229278611-RCWA-Solver-Simulation-Object