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关于周期结构中缺陷检测仿真

- September 3, 2024 at 9:16 am
  
  3508911812
  Subscriber
  
  老师您好，
  如果我想要在类似光栅的叠层结构如下图中仿真缺陷检测，即通过监视器的近场数据得到像面上的图像，所以我想请问这种情况下的仿真设置应该是什么，是平面波加周期性边界条件吗？
- September 9, 2024 at 7:24 pm
  
  Guilin Sun
  Ansys Employee
  
  请参考
  Optical Defect Metrology (S-Matrix)
  Optical Defect Metrology (Direct Simulation)
  Optical Metrology - S-Matrix Methodology
  Defect scattering and detection
  Defect on a metal surface

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