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Dear Kawshik,
Thank you for contacting us!
If I understand correctly, this is a substrate with etched material in pyramid shape. This means that the material of the pyramids is air. If this is the case then you can create a new structure group where you will define the substrate by inserting a rectangle and an array of pyramids. The material of the pyramids should be set to etch.
An example of such a structure group is the following:
The x_span and y_span parameters are the x and y length of the base of each pyramid. The z_span is the pyramid height. The x_period and y_period is the number of pyramids in the x and y direction.
The x_span_rect, y_span_rect and z_span_rect are the dimensions of the substrate.
After inserting these parameters in the "Properties" tab, you can add the following script in the "Script" tab:
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deleteall;
for (i=1:y_period) {
 for (j=1:x_period) {
  addpyramid;
  set("x",(x_span/2)+(j-1)*x_span-x_period*x_span/2);
  set("y",(y_span/2)+(i-1)*y_span-y_period*y_span/2);
  set("x span bottom",x_span);
  set("x span top",0);
  set("y span bottom",y_span);
  set("y span top",0);
  set("z span",z_span);
  set("material","etch");
 }
}
addrect;
set("x span",x_span_rect);
set("y span",y_span_rect);
set("z min",-z_span/2);
set("z max",-z_span/2+z_span_rect);
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You can also add an index monitor to check the results.
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Best Regards,
Afroditi