Learning Forum

[thechiyun]

 I want to do a computational analysis of the etch chemistry to establish the required composition of the plasma. 

ex: use the CF4 for etching of Si, finding another chemical material to see if it can replace/break down CF4

[Rob]

OK. What do you actually want to model?

[thechiyun]

I want to use the PFC and HFC gases to do a calculation so I think I need some information like rate equation, mechanisms and etc.
I want to know like how complete is your database with the chemkin.

[Rob]

Having checked with a colleague he didn't find any HFC chemistry referred to in the documentation. I suspect you'll need to find a detailed reaction scheme in the literature.