TAGGED: fdtd
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May 4, 2021 at 10:05 pm
pcu
SubscriberDear Sir or Madam,
I am experiencing an issue while trying to upload the GDS file shown in the image below on the LayerBuilder utilities when the sidewall angle is <=86deg and the sidewall angle position reference is set to Middle. All the detailed settings are in the attached screenshot below.
May 7, 2021 at 8:27 pmTaylor Robertson
Ansys EmployeeHello Pietro I just found this issue. I will copy, my previous response here in the hope that it can help others.
I suspect what is going on here is that the polygon points after sidewall transformation will self intersect resulting in an invalid planar solid object. See thePlanar solid - Simulation Object. I don't know exactly what points are causing this issue, but I suspect some of the closely spaced points on the corner.
I think the best thing to do would be to clean-up the geometry a bit using less vertices to define the structure if possible, or else avoiding rounding as this may be causing some of the scatter.
If you look at this polygon
ÔÇï
We can go to much steeper sidewall angles.
ÔÇïBest Regards
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