{"id":404099,"date":"2025-01-08T12:28:22","date_gmt":"2025-01-08T12:28:22","guid":{"rendered":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/shiyongrcwajinxingcanshusaomiaodewentiqingjiao\/"},"modified":"2025-01-08T12:28:22","modified_gmt":"2025-01-08T12:28:22","slug":"shiyongrcwajinxingcanshusaomiaodewentiqingjiao","status":"publish","type":"topic","link":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/shiyongrcwajinxingcanshusaomiaodewentiqingjiao\/","title":{"rendered":"\u4f7f\u7528RCWA\u8fdb\u884c\u53c2\u6570\u626b\u63cf\u7684\u95ee\u9898\u8bf7\u6559"},"content":{"rendered":"<p>&lt;p&gt;\u8001\u5e08\u60a8\u597d\uff01&lt;\/p&gt;&lt;p&gt;\u6211\u6b63\u5728\u590d\u73b0\u4e00\u7bc7\u8bba\u6587\u4e2d\u5bf9\u5355\u4e2a\u7eb3\u7c73\u7ed3\u6784\u5355\u5143\u53c2\u6570\u626b\u63cf\u7684\u7ed3\u679c\uff0c\u6240\u4f7f\u7528\u7684\u7eb3\u7c73\u67f1\u662f\u77e9\u5f62\u4e8c\u6c27\u5316\u949b\uff0c\u57fa\u5e95\u662f\u73bb\u7483\u3002\u5047\u8bbe\u8be5\u7eb3\u7c73\u5355\u5143\u7684\u743c\u65af\u77e9\u9635\u5199\u4f5c[txx,0;0,tyy]\uff0c\u8bba\u6587\u626b\u63cf\u4e86\u7eb3\u7c73\u67f1\u7684\u957f\u548c\u5bbd\u572860-260nm\u8303\u56f4\u5185txx\u7684\u76f8\u4f4d\u5206\u5e03\uff0c\u5373angle(txx)\uff0c\u7ed3\u679c\u5982\u56fe1\u6240\u793a\u3002\u8bba\u6587\u58f0\u79f0\u4ed6\u4eec\u4f7f\u7528\u7684\u662fRCWA\u8fdb\u884c\u7684\u626b\u63cf\u3002&lt;\/p&gt;&lt;p&gt;\u6211\u9996\u5148\u4f7f\u7528FDTD\u8fdb\u884c\u590d\u73b0\uff0c\u7ed3\u679c\u548c\u8bba\u6587\u4e00\u81f4\u3002&lt;\/p&gt;&lt;p&gt;\u63a5\u7740\u6211\u4f7f\u7528RCWA\u8fdb\u884c\u590d\u73b0\uff0c\u7ed3\u679c\u548c\u8bba\u6587\u867d\u7136\u76f8\u4f3c\uff0c\u4f46\u6709\u4e00\u5b9a\u7684\u533a\u522b\uff0c\u7ed3\u679c\u5982\u56fe2\u6240\u793a\u3002\u6211\u662f\u6309\u7167&ldquo;Small-Scale Metalens &ndash; Field Propagation&rdquo;\u8fd9\u7bc7\u6848\u4f8b\u7684step2\u8fdb\u884c\u4eff\u771f\u7684\u3002&lt;\/p&gt;&lt;p&gt;\u6211\u60f3\u8bf7\u95ee\u8001\u5e08\uff1a&lt;\/p&gt;&lt;p&gt;1\u3001\u6211\u8bbe\u7f6e\u7684 k vectors \u7684\u6570\u91cf\u548c\u6848\u4f8b\u4e00\u81f4\uff0c\u662f100\uff0c\u662f\u5426\u9700\u8981\u589e\u5927\uff1f&lt;\/p&gt;&lt;p&gt;2\u3001\u5728\u4f7f\u7528RCWA\u65f6\uff0c\u5229\u7528\u6848\u4f8b\u4e2d\u7684\u4ee3\u7801&ldquo;S = pinch(grating_characterization.Tpp(1,1,ni,mi,:,:)); phase_txx = angle(S);&rdquo; \u83b7\u5f97\u7684phase_txx\u662f\u5426\u5c31\u662f\u6211\u4eec\u9700\u8981\u7684angle(txx)\uff1f\u7531\u4e8e\u5728\u4f7f\u7528RCWA\u4e2d\u65e0\u9700\u5b9a\u4e49\u5165\u5c04\u5149\u7684\u521d\u59cb\u76f8\u4f4d\uff0c\u6211\u62c5\u5fc3phase_txx\u662f\u5426\u9700\u8981\u51cf\u53bb\u4e00\u4e2a\u521d\u59cb\u76f8\u4f4d\u624d\u7b49\u4e8eangle(txx)\u3002&lt;\/p&gt;&lt;p&gt;3\u3001\u662f\u5426\u6709\u5176\u4ed6\u7684\u539f\u56e0\u5bfc\u81f4RCWA\u7684\u7ed3\u679c\u4e0d\u591f\u51c6\u786e\uff1f&lt;\/p&gt;&lt;p&gt;\u975e\u5e38\u611f\u8c22\u8001\u5e08\u7684\u89e3\u7b54\uff01&lt;\/p&gt;&lt;p&gt;\u56fe1&lt;\/p&gt;&lt;p&gt;<img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/innovationspace.ansys.com\/forum\/wp-content\/uploads\/sites\/2\/2025\/01\/08-01-2025-1736339111-mceclip1.png\" width=\"303\" height=\"229\" \/>&lt;\/p&gt;&lt;p&gt;\u56fe2&lt;\/p&gt;&lt;p&gt;<img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/innovationspace.ansys.com\/forum\/wp-content\/uploads\/sites\/2\/2025\/01\/08-01-2025-1736339144-mceclip2.png\" width=\"299\" height=\"243\" \/>&lt;\/p&gt;<\/p>\n","protected":false},"template":"","class_list":["post-404099","topic","type-topic","status-publish","hentry"],"aioseo_notices":[],"aioseo_head":"\n\t\t<!-- All in One SEO 4.9.10 - aioseo.com -->\n\t<meta name=\"description\" content=\"\u8001\u5e08\u60a8\u597d\uff01\u6211\u6b63\u5728\u590d\u73b0\u4e00\u7bc7\u8bba\u6587\u4e2d\u5bf9\u5355\u4e2a\u7eb3\u7c73\u7ed3\u6784\u5355\u5143\u53c2\u6570\u626b\u63cf\u7684\u7ed3\u679c\uff0c\u6240\u4f7f\u7528\u7684\u7eb3\u7c73\u67f1\u662f\u77e9\u5f62\u4e8c\u6c27\u5316\u949b\uff0c\u57fa\u5e95\u662f\u73bb\u7483\u3002\u5047\u8bbe\u8be5\u7eb3\u7c73\u5355\u5143\u7684\u743c\u65af\u77e9\u9635\u5199\u4f5c[txx,0;0,tyy]\uff0c\u8bba\u6587\u626b\u63cf\u4e86\u7eb3\u7c73\u67f1\u7684\u957f\u548c\u5bbd\u572860-260nm\u8303\u56f4\u5185txx\u7684\u76f8\u4f4d\u5206\u5e03\uff0c\u5373angle(txx)\uff0c\u7ed3\u679c\u5982\u56fe1\u6240\u793a\u3002\u8bba\u6587\u58f0\u79f0\u4ed6\u4eec\u4f7f\u7528\u7684\u662fRCWA\u8fdb\u884c\u7684\u626b\u63cf\u3002\u6211\u9996\u5148\u4f7f\u7528FDTD\u8fdb\u884c\u590d\u73b0\uff0c\u7ed3\u679c\u548c\u8bba\u6587\u4e00\u81f4\u3002\u63a5\u7740\u6211\u4f7f\u7528RCWA\u8fdb\u884c\u590d\u73b0\uff0c\u7ed3\u679c\u548c\u8bba\u6587\u867d\u7136\u76f8\u4f3c\uff0c\u4f46\u6709\u4e00\u5b9a\u7684\u533a\u522b\uff0c\u7ed3\u679c\u5982\u56fe2\u6240\u793a\u3002\u6211\u662f\u6309\u7167\u201cSmall-Scale Metalens \u2013 Field Propagation\u201d\u8fd9\u7bc7\u6848\u4f8b\u7684step2\u8fdb\u884c\u4eff\u771f\u7684\u3002\u6211\u60f3\u8bf7\u95ee\u8001\u5e08\uff1a1\u3001\u6211\u8bbe\u7f6e\u7684 k vectors \u7684\u6570\u91cf\u548c\u6848\u4f8b\u4e00\u81f4\uff0c\u662f100\uff0c\u662f\u5426\u9700\u8981\u589e\u5927\uff1f2\u3001\u5728\u4f7f\u7528RCWA\u65f6\uff0c\u5229\u7528\u6848\u4f8b\u4e2d\u7684\u4ee3\u7801\u201cS = pinch(grating_characterization.Tpp(1,1,ni,mi,:,:)); phase_txx = angle(S);\u201d \u83b7\u5f97\u7684phase_txx\u662f\u5426\u5c31\u662f\u6211\u4eec\u9700\u8981\u7684angle(txx)\uff1f\u7531\u4e8e\u5728\u4f7f\u7528RCWA\u4e2d\u65e0\u9700\u5b9a\u4e49\u5165\u5c04\u5149\u7684\u521d\u59cb\u76f8\u4f4d\uff0c\u6211\u62c5\u5fc3phase_txx\u662f\u5426\u9700\u8981\u51cf\u53bb\u4e00\u4e2a\u521d\u59cb\u76f8\u4f4d\u624d\u7b49\u4e8eangle(txx)\u30023\u3001\u662f\u5426\u6709\u5176\u4ed6\u7684\u539f\u56e0\u5bfc\u81f4RCWA\u7684\u7ed3\u679c\u4e0d\u591f\u51c6\u786e\uff1f\u975e\u5e38\u611f\u8c22\u8001\u5e08\u7684\u89e3\u7b54\uff01\u56fe1\u56fe2\" \/>\n\t<meta name=\"robots\" content=\"max-image-preview:large\" \/>\n\t<link rel=\"canonical\" href=\"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/shiyongrcwajinxingcanshusaomiaodewentiqingjiao\/\" \/>\n\t<meta name=\"generator\" content=\"All in One SEO (AIOSEO) 4.9.10\" \/>\n\t\t<meta property=\"og:locale\" content=\"en_US\" \/>\n\t\t<meta property=\"og:site_name\" content=\"Ansys Learning Forum | Ansys Innovation Space\" \/>\n\t\t<meta property=\"og:type\" content=\"article\" \/>\n\t\t<meta property=\"og:title\" content=\"\u4f7f\u7528RCWA\u8fdb\u884c\u53c2\u6570\u626b\u63cf\u7684\u95ee\u9898\u8bf7\u6559 | Ansys Learning Forum\" \/>\n\t\t<meta property=\"og:description\" content=\"\u8001\u5e08\u60a8\u597d\uff01\u6211\u6b63\u5728\u590d\u73b0\u4e00\u7bc7\u8bba\u6587\u4e2d\u5bf9\u5355\u4e2a\u7eb3\u7c73\u7ed3\u6784\u5355\u5143\u53c2\u6570\u626b\u63cf\u7684\u7ed3\u679c\uff0c\u6240\u4f7f\u7528\u7684\u7eb3\u7c73\u67f1\u662f\u77e9\u5f62\u4e8c\u6c27\u5316\u949b\uff0c\u57fa\u5e95\u662f\u73bb\u7483\u3002\u5047\u8bbe\u8be5\u7eb3\u7c73\u5355\u5143\u7684\u743c\u65af\u77e9\u9635\u5199\u4f5c[txx,0;0,tyy]\uff0c\u8bba\u6587\u626b\u63cf\u4e86\u7eb3\u7c73\u67f1\u7684\u957f\u548c\u5bbd\u572860-260nm\u8303\u56f4\u5185txx\u7684\u76f8\u4f4d\u5206\u5e03\uff0c\u5373angle(txx)\uff0c\u7ed3\u679c\u5982\u56fe1\u6240\u793a\u3002\u8bba\u6587\u58f0\u79f0\u4ed6\u4eec\u4f7f\u7528\u7684\u662fRCWA\u8fdb\u884c\u7684\u626b\u63cf\u3002\u6211\u9996\u5148\u4f7f\u7528FDTD\u8fdb\u884c\u590d\u73b0\uff0c\u7ed3\u679c\u548c\u8bba\u6587\u4e00\u81f4\u3002\u63a5\u7740\u6211\u4f7f\u7528RCWA\u8fdb\u884c\u590d\u73b0\uff0c\u7ed3\u679c\u548c\u8bba\u6587\u867d\u7136\u76f8\u4f3c\uff0c\u4f46\u6709\u4e00\u5b9a\u7684\u533a\u522b\uff0c\u7ed3\u679c\u5982\u56fe2\u6240\u793a\u3002\u6211\u662f\u6309\u7167\u201cSmall-Scale Metalens \u2013 Field Propagation\u201d\u8fd9\u7bc7\u6848\u4f8b\u7684step2\u8fdb\u884c\u4eff\u771f\u7684\u3002\u6211\u60f3\u8bf7\u95ee\u8001\u5e08\uff1a1\u3001\u6211\u8bbe\u7f6e\u7684 k vectors \u7684\u6570\u91cf\u548c\u6848\u4f8b\u4e00\u81f4\uff0c\u662f100\uff0c\u662f\u5426\u9700\u8981\u589e\u5927\uff1f2\u3001\u5728\u4f7f\u7528RCWA\u65f6\uff0c\u5229\u7528\u6848\u4f8b\u4e2d\u7684\u4ee3\u7801\u201cS = pinch(grating_characterization.Tpp(1,1,ni,mi,:,:)); phase_txx = angle(S);\u201d \u83b7\u5f97\u7684phase_txx\u662f\u5426\u5c31\u662f\u6211\u4eec\u9700\u8981\u7684angle(txx)\uff1f\u7531\u4e8e\u5728\u4f7f\u7528RCWA\u4e2d\u65e0\u9700\u5b9a\u4e49\u5165\u5c04\u5149\u7684\u521d\u59cb\u76f8\u4f4d\uff0c\u6211\u62c5\u5fc3phase_txx\u662f\u5426\u9700\u8981\u51cf\u53bb\u4e00\u4e2a\u521d\u59cb\u76f8\u4f4d\u624d\u7b49\u4e8eangle(txx)\u30023\u3001\u662f\u5426\u6709\u5176\u4ed6\u7684\u539f\u56e0\u5bfc\u81f4RCWA\u7684\u7ed3\u679c\u4e0d\u591f\u51c6\u786e\uff1f\u975e\u5e38\u611f\u8c22\u8001\u5e08\u7684\u89e3\u7b54\uff01\u56fe1\u56fe2\" \/>\n\t\t<meta property=\"og:url\" content=\"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/shiyongrcwajinxingcanshusaomiaodewentiqingjiao\/\" \/>\n\t\t<meta property=\"article:published_time\" content=\"2025-01-08T12:28:22+00:00\" \/>\n\t\t<meta property=\"article:modified_time\" content=\"2025-01-08T12:28:22+00:00\" \/>\n\t\t<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n\t\t<meta name=\"twitter:title\" content=\"\u4f7f\u7528RCWA\u8fdb\u884c\u53c2\u6570\u626b\u63cf\u7684\u95ee\u9898\u8bf7\u6559 | Ansys Learning Forum\" \/>\n\t\t<meta name=\"twitter:description\" content=\"\u8001\u5e08\u60a8\u597d\uff01\u6211\u6b63\u5728\u590d\u73b0\u4e00\u7bc7\u8bba\u6587\u4e2d\u5bf9\u5355\u4e2a\u7eb3\u7c73\u7ed3\u6784\u5355\u5143\u53c2\u6570\u626b\u63cf\u7684\u7ed3\u679c\uff0c\u6240\u4f7f\u7528\u7684\u7eb3\u7c73\u67f1\u662f\u77e9\u5f62\u4e8c\u6c27\u5316\u949b\uff0c\u57fa\u5e95\u662f\u73bb\u7483\u3002\u5047\u8bbe\u8be5\u7eb3\u7c73\u5355\u5143\u7684\u743c\u65af\u77e9\u9635\u5199\u4f5c[txx,0;0,tyy]\uff0c\u8bba\u6587\u626b\u63cf\u4e86\u7eb3\u7c73\u67f1\u7684\u957f\u548c\u5bbd\u572860-260nm\u8303\u56f4\u5185txx\u7684\u76f8\u4f4d\u5206\u5e03\uff0c\u5373angle(txx)\uff0c\u7ed3\u679c\u5982\u56fe1\u6240\u793a\u3002\u8bba\u6587\u58f0\u79f0\u4ed6\u4eec\u4f7f\u7528\u7684\u662fRCWA\u8fdb\u884c\u7684\u626b\u63cf\u3002\u6211\u9996\u5148\u4f7f\u7528FDTD\u8fdb\u884c\u590d\u73b0\uff0c\u7ed3\u679c\u548c\u8bba\u6587\u4e00\u81f4\u3002\u63a5\u7740\u6211\u4f7f\u7528RCWA\u8fdb\u884c\u590d\u73b0\uff0c\u7ed3\u679c\u548c\u8bba\u6587\u867d\u7136\u76f8\u4f3c\uff0c\u4f46\u6709\u4e00\u5b9a\u7684\u533a\u522b\uff0c\u7ed3\u679c\u5982\u56fe2\u6240\u793a\u3002\u6211\u662f\u6309\u7167\u201cSmall-Scale Metalens \u2013 Field Propagation\u201d\u8fd9\u7bc7\u6848\u4f8b\u7684step2\u8fdb\u884c\u4eff\u771f\u7684\u3002\u6211\u60f3\u8bf7\u95ee\u8001\u5e08\uff1a1\u3001\u6211\u8bbe\u7f6e\u7684 k vectors \u7684\u6570\u91cf\u548c\u6848\u4f8b\u4e00\u81f4\uff0c\u662f100\uff0c\u662f\u5426\u9700\u8981\u589e\u5927\uff1f2\u3001\u5728\u4f7f\u7528RCWA\u65f6\uff0c\u5229\u7528\u6848\u4f8b\u4e2d\u7684\u4ee3\u7801\u201cS = pinch(grating_characterization.Tpp(1,1,ni,mi,:,:)); 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phase_txx = angle(S);\u201d \u83b7\u5f97\u7684phase_txx\u662f\u5426\u5c31\u662f\u6211\u4eec\u9700\u8981\u7684angle(txx)\uff1f\u7531\u4e8e\u5728\u4f7f\u7528RCWA\u4e2d\u65e0\u9700\u5b9a\u4e49\u5165\u5c04\u5149\u7684\u521d\u59cb\u76f8\u4f4d\uff0c\u6211\u62c5\u5fc3phase_txx\u662f\u5426\u9700\u8981\u51cf\u53bb\u4e00\u4e2a\u521d\u59cb\u76f8\u4f4d\u624d\u7b49\u4e8eangle(txx)\u30023\u3001\u662f\u5426\u6709\u5176\u4ed6\u7684\u539f\u56e0\u5bfc\u81f4RCWA\u7684\u7ed3\u679c\u4e0d\u591f\u51c6\u786e\uff1f\u975e\u5e38\u611f\u8c22\u8001\u5e08\u7684\u89e3\u7b54\uff01\u56fe1\u56fe2","inLanguage":"en-US","isPartOf":{"@id":"https:\/\/innovationspace.ansys.com\/forum\/#website"},"breadcrumb":{"@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/shiyongrcwajinxingcanshusaomiaodewentiqingjiao\/#breadcrumblist"},"datePublished":"2025-01-08T12:28:22+00:00","dateModified":"2025-01-08T12:28:22+00:00"},{"@type":"WebSite","@id":"https:\/\/innovationspace.ansys.com\/forum\/#website","url":"https:\/\/innovationspace.ansys.com\/forum\/","name":"Ansys Learning Forum","description":"Ansys Innovation Space","inLanguage":"en-US","publisher":{"@id":"https:\/\/innovationspace.ansys.com\/forum\/#organization"}}]},"og:locale":"en_US","og:site_name":"Ansys Learning Forum | Ansys Innovation Space","og:type":"article","og:title":"\u4f7f\u7528RCWA\u8fdb\u884c\u53c2\u6570\u626b\u63cf\u7684\u95ee\u9898\u8bf7\u6559 | Ansys Learning Forum","og:description":"\u8001\u5e08\u60a8\u597d\uff01\u6211\u6b63\u5728\u590d\u73b0\u4e00\u7bc7\u8bba\u6587\u4e2d\u5bf9\u5355\u4e2a\u7eb3\u7c73\u7ed3\u6784\u5355\u5143\u53c2\u6570\u626b\u63cf\u7684\u7ed3\u679c\uff0c\u6240\u4f7f\u7528\u7684\u7eb3\u7c73\u67f1\u662f\u77e9\u5f62\u4e8c\u6c27\u5316\u949b\uff0c\u57fa\u5e95\u662f\u73bb\u7483\u3002\u5047\u8bbe\u8be5\u7eb3\u7c73\u5355\u5143\u7684\u743c\u65af\u77e9\u9635\u5199\u4f5c[txx,0;0,tyy]\uff0c\u8bba\u6587\u626b\u63cf\u4e86\u7eb3\u7c73\u67f1\u7684\u957f\u548c\u5bbd\u572860-260nm\u8303\u56f4\u5185txx\u7684\u76f8\u4f4d\u5206\u5e03\uff0c\u5373angle(txx)\uff0c\u7ed3\u679c\u5982\u56fe1\u6240\u793a\u3002\u8bba\u6587\u58f0\u79f0\u4ed6\u4eec\u4f7f\u7528\u7684\u662fRCWA\u8fdb\u884c\u7684\u626b\u63cf\u3002\u6211\u9996\u5148\u4f7f\u7528FDTD\u8fdb\u884c\u590d\u73b0\uff0c\u7ed3\u679c\u548c\u8bba\u6587\u4e00\u81f4\u3002\u63a5\u7740\u6211\u4f7f\u7528RCWA\u8fdb\u884c\u590d\u73b0\uff0c\u7ed3\u679c\u548c\u8bba\u6587\u867d\u7136\u76f8\u4f3c\uff0c\u4f46\u6709\u4e00\u5b9a\u7684\u533a\u522b\uff0c\u7ed3\u679c\u5982\u56fe2\u6240\u793a\u3002\u6211\u662f\u6309\u7167\u201cSmall-Scale Metalens \u2013 Field Propagation\u201d\u8fd9\u7bc7\u6848\u4f8b\u7684step2\u8fdb\u884c\u4eff\u771f\u7684\u3002\u6211\u60f3\u8bf7\u95ee\u8001\u5e08\uff1a1\u3001\u6211\u8bbe\u7f6e\u7684 k vectors \u7684\u6570\u91cf\u548c\u6848\u4f8b\u4e00\u81f4\uff0c\u662f100\uff0c\u662f\u5426\u9700\u8981\u589e\u5927\uff1f2\u3001\u5728\u4f7f\u7528RCWA\u65f6\uff0c\u5229\u7528\u6848\u4f8b\u4e2d\u7684\u4ee3\u7801\u201cS = pinch(grating_characterization.Tpp(1,1,ni,mi,:,:)); 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