{"id":393278,"date":"2024-11-08T07:57:12","date_gmt":"2024-11-08T07:57:12","guid":{"rendered":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/vibration-simulation-analysis-for-chemical-mechanical-polishing-cmp-process\/"},"modified":"2024-11-11T05:58:24","modified_gmt":"2024-11-11T05:58:24","slug":"vibration-simulation-analysis-for-chemical-mechanical-polishing-cmp-process","status":"publish","type":"topic","link":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/vibration-simulation-analysis-for-chemical-mechanical-polishing-cmp-process\/","title":{"rendered":"Vibration simulation analysis for chemical mechanical polishing (CMP) process"},"content":{"rendered":"<p>&lt;p&gt;&lt;span style=&#8221;vertical-align: inherit;&#8221;&gt;&lt;span style=&#8221;vertical-align: inherit;&#8221;&gt;&lt;p&gt;\u4f60\u597d\u3002\u5c0d CMP \u88fd\u7a0b\u9032\u884c\u632f\u52d5\u6a21\u64ec\u5206\u6790\u6240\u56fa\u6709\u7684\u8907\u96dc\u6027\u8a73\u7d30\u95e1\u8ff0\u5982\u4e0b\u3002\u4e0d\u771f\u5be6\u7684\u63a5\u89f8\u884c\u70ba\uff1a\u5728\u4e0d\u8003\u616e\u632f\u52d5\u7684CMP\u88fd\u7a0b\u6a21\u64ec\u4e2d\uff0c\u7576\u65bd\u52a02N\u7684\u5411\u4e0b\u529b\u6642\uff0c\u6a21\u64ec\u7d50\u679c\u986f\u793a\u7802\u8f2a\u548c\u5de5\u4ef6\u4e4b\u9593\u5b58\u5728\u660e\u986f\u7684\u5f48\u8df3\uff0c\u5c0e\u81f4\u5c40\u90e8\u61c9\u529b\u904e\u4f4e\u3002 &gt;2\u3002\u61c9\u7528\u632f\u52d5\u8f09\u8377\uff1a\u5982\u4f55\u5728\u77ac\u614b\u6a21\u64ec\u4e2d\u5c07\u632f\u52d5\u8f09\u8377\u65bd\u52a0\u5230\u652f\u6490\u67b6\u7684\u4e3b\u8ef8&lt;\/span&gt;&lt;\/span&gt;<img decoding=\"async\" src=\"https:\/\/innovationspace.ansys.com\/forum\/wp-content\/uploads\/sites\/2\/2024\/11\/08-11-2024-1731052527-mceclip0.png\" \/>&lt;span style=&#8221;vertical-align: inherit;&#8221;&gt;&lt;span style=&#8221;vertical-align: inherit;&#8221;&gt;\u4e0a&lt;\/span&gt;&lt;span style=&#8221;vertical-align: inherit;&#8221;&gt;\uff0c\u4ee5\u66f4\u6e96\u78ba\u5730\u6a21\u64ec CMP \u904e\u7a0b\u4e2d\u7684\u632f\u52d5\u5f71\u97ff\uff1f&lt;\/span&gt;&lt;span style=&#8221;vertical-align: inherit;&#8221;&gt;&gt;&lt;br&gt; &lt;\/span&gt;&lt;\/span&gt;<img decoding=\"async\" src=\"https:\/\/innovationspace.ansys.com\/forum\/wp-content\/uploads\/sites\/2\/2024\/11\/08-11-2024-1731052548-mceclip1.jpg\" \/>&lt;span style=&#8221;font-size: 14pt;&#8221;&gt;&lt;br&gt;&lt;br&gt;&lt;br&gt;&lt;br&gt;&lt;br&gt;<img decoding=\"async\" src=\"https:\/\/innovationspace.ansys.com\/forum\/wp-content\/uploads\/sites\/2\/2024\/11\/11-11-2024-1731304697-mceclip0.png\" \/>&lt;\/span&gt;&lt;\/p&gt;<\/p>\n","protected":false},"template":"","class_list":["post-393278","topic","type-topic","status-publish","hentry","topic-tag-Modal_Analysis-1","topic-tag-contact","topic-tag-mechanical","topic-tag-transient-structural"],"aioseo_notices":[],"acf":[],"custom_fields":[{"0":{"_bbp_subscription":["284408","440006"],"_bbp_author_ip":["140.117.58.183"],"_btv_view_count":["375"],"_bbp_topic_status":["unanswered"],"_edit_last":["284408"],"_bbp_revision_log":["a:1:{i:393519;a:2:{s:6:\"author\";i:284408;s:6:\"reason\";s:0:\"\";}}"],"_bbp_topic_id":["393278"],"_bbp_forum_id":["27791"],"_bbp_engagement":["284408","440006"],"_bbp_voice_count":["2"],"_bbp_reply_count":["2"],"_bbp_last_reply_id":["394167"],"_bbp_last_active_id":["394167"],"_bbp_last_active_time":["2024-11-19 05:38:22"]},"test":"m113020070nsysu-edu-tw"}],"_links":{"self":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/topics\/393278","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/topics"}],"about":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/types\/topic"}],"version-history":[{"count":1,"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/topics\/393278\/revisions"}],"predecessor-version":[{"id":393519,"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/topics\/393278\/revisions\/393519"}],"wp:attachment":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/media?parent=393278"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}