{"id":294296,"date":"2023-07-21T15:30:17","date_gmt":"2023-07-21T15:30:17","guid":{"rendered":"\/forum\/forums\/topic\/import-stl-files-from-prolith-to-fdtd-scaling-and-parameter-problems\/"},"modified":"2023-07-21T15:39:01","modified_gmt":"2023-07-21T15:39:01","slug":"import-stl-files-from-prolith-to-fdtd-scaling-and-parameter-problems","status":"closed","type":"topic","link":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/import-stl-files-from-prolith-to-fdtd-scaling-and-parameter-problems\/","title":{"rendered":"Import .stl files from prolith to FDTD, scaling factor and parameter problems."},"content":{"rendered":"

Hello Admin,<\/p>\n

I wanted to import .stl files using the 3D resist profile from Prolith into FDTD. When I tried to import the .stl file, FDTD asked me to determine the scaling factor for the data. I wanted to keep the original size of the data in nanometers (nm), so I set the scaling factor to 1. (I have attached a picture of my simulation and the parameters of the .stl file below).<\/p>\n

\".stl<\/a><\/p>\n

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.stl file<\/p>\n

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The measurement value is from the left line block of the .stl file.<\/p>\n

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Scaling factor from FDTD<\/p>\n

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However, when FDTD successfully imported the .stl data, it seemed that the size of the data became exceedingly larger in FDTD compared to the original CD mean measurement value. I tried setting the scaling factor to 1, 0.001 (10^-3), and 0.000001 (10^-6), but the size of the block or planar solid was still large. I also tried making the grid size in FDTD similar to the grid size that I used in Prolith before importing the .stl file (grid size of 10 nm), but the result was still the same – I got a larger size value for the structure.<\/p>\n

<\/a><\/p>\n

grid sizes in prolith<\/p>\n

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grid sizes in FDTD.<\/p>\n

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The measurement value width is at a scaling factor of 1. The XY view cannot show the whole picture of the .stl file because the value is too big (140000000000 nm)<\/p>\n

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<\/a><\/a><\/p>\n

The measurement value width is at a scaling factor of 0.001 (10^-3) (129000000nm)<\/p>\n

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The measurement value width is at a scaling factor of 0.000001 (10^-6). (131000nm)<\/p>\n

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But when I tried setting the scaling factor to 0.000000001 (10^-9), I saw that the width of one of the planar solids became close to its original size (CD Mean) using a ruler, as you can see from the picture below. However, I am not sure if the measured value from the ruler <\/strong>can be used to compare with the original .stl data because after importing, it became a planar solid and I could only modify its x, y, and z positions. It did not show any other values.<\/p>\n

<\/a><\/p>\n

ruler tool in FDTD<\/p>\n

 <\/p>\n

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<\/a><\/p>\n

The measurement value width is at a scaling factor of 0.000000001 (10^-9) (129nm)<\/p>\n

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The measurement value is from the left line block of the .stl file. (CD mean is 112.9 nm)<\/p>\n

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The left side of the beam in the .stl file<\/p>\n

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So, I have some questions:<\/p>\n

1.      <\/span>Did I miss any steps or do anything wrong when trying to rescale the .stl file? Is there anything else that I need to do before importing my .stl file in order to avoid problems with its size becoming larger in FDTD than in its original file?<\/p>\n

2.      <\/span>Currently, I am only measuring the width of the planar solid using a ruler in FDTD and my .stl file has a peculiar shape with different width values, as you can see from my previous image attachment. Hence, I want to ask if there is any way or tool that can help me know or measure precisely in FDTD, such as x span, y span, average width, etc., for my imported .stl file.<\/p>\n

3.      <\/span>Is there any way that I can know the value of the sidewall angle of the imported structure and any values besides the left and right sidewalls? Such as line edge roughness (LER) and line width roughness (LWR), so I can make a direct comparison to see if the values for the sidewall angle, LER, and LWR are the same as in the original data in FDTD?<\/p>\n

Thank you very much for your attention and kind support.<\/p>\n

Regards,<\/p>\n

Miller.<\/p>\n","protected":false},"template":"","class_list":["post-294296","topic","type-topic","status-closed","hentry","topic-tag-stl-import"],"aioseo_notices":[],"acf":[],"custom_fields":[{"0":{"_bbp_subscription":["277915","2592"],"_bbp_author_ip":["23.33.28.199"]," _bbp_last_reply_id":["0"]," _bbp_likes_count":["0"],"_btv_view_count":["983"],"_edit_lock":["1689957834:217515"],"_bbp_topic_status":["unanswered"],"_bbp_status":["publish"],"_bbp_topic_id":["294296"],"_bbp_forum_id":["27833"],"_bbp_engagement":["2592","277915"],"_bbp_voice_count":["2"],"_bbp_reply_count":["6"],"_bbp_last_reply_id":["295404"],"_bbp_last_active_id":["295404"],"_bbp_last_active_time":["2023-07-28 18:52:43"]},"test":"m11112801mail-ntust-edu-tw"}],"_links":{"self":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/topics\/294296","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/topics"}],"about":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/types\/topic"}],"version-history":[{"count":0,"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/topics\/294296\/revisions"}],"wp:attachment":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/media?parent=294296"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}