{"id":164928,"date":"2021-12-17T10:03:14","date_gmt":"2021-12-17T10:03:14","guid":{"rendered":"\/forum\/forums\/topic\/ZhouQiMoXingRuHeHuoDeBuTongJuLiDeYuanChangFenBu"},"modified":"2022-07-28T10:21:47","modified_gmt":"2022-07-28T10:21:47","slug":"zhouqimoxingruhehuodebutongjulideyuanchangfenbu","status":"closed","type":"topic","link":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\/","title":{"rendered":"\u5468\u671f\u6a21\u578b\u5982\u4f55\u83b7\u5f97\u4e0d\u540c\u8ddd\u79bb\u7684\u8fdc\u573a\u5206\u5e03\uff1f"},"content":{"rendered":"<div>\n<p>\u8001\u5e08\uff0c\u60a8\u597d\uff01<\/p>\n<p>\u7f51\u5740\uff1a<a href=\"https:\/\/support.lumerical.com\/hc\/en-us\/articles\/360041781874-Photolithographic-projection-to-photoresist\" rel=\"nofollow\">https:\/\/support.lumerical.com\/hc\/en-us\/articles\/360041781874-Photolithographic-projection-to-photoresist<\/a><\/p>\n<p> \u6211\u5728\u4e0a\u9762\u7f51\u5740\u5904\u7684\u4f8b\u5b50\u4e2d\u53d1\u73b0\uff0c\u5176\u811a\u672c\u4f7f\u7528grating\u51fd\u6570\u83b7\u5f97\u4e8699.83um\u5904\u573a\u5f3a\u5206\u5e03\uff0c\u8be5\u573a\u5f3a\u5206\u5e03\u53ef\u4ee5\u8ba4\u4e3a\u662f99.83um\u5904\u7684\u8fdc\u573a\u5206\u5e03\u5417\uff1f\u8fd9\u4e2a\u7ed3\u679c\u4e0e\u7528grating transmission\u5206\u6790\u7ec4\u83b7\u5f97T_grating\u884d\u5c04\u7ea7\u6570\u5206\u5e03\u6709\u4f55\u533a\u522b\u5462?\u6839\u636e\u60a8\u4ee5\u524d\u8bf4\u6cd5\uff0c\u65e0\u9650\u5468\u671f\u6a21\u578b\u65e0\u6cd5\u83b7\u5f97\u8fdc\u573a\u5206\u5e03\u56fe\u6837\uff1f\u6240\u4ee5\u73b0\u5728\u5bf9\u4ee5\u4e0a\u95ee\u9898\u6bd4\u8f83\u8ff7\u60d1\uff0c\u8bf7\u60a8\u5e2e\u5fd9\u56de\u7b54\u3002<\/p>\n<div><\/p>\n<div><a href=\"\/forum\/wp-content\/uploads\/forum-uploads\/760\/J2X7FJOR5Q0U.png\" rel=\"nofollow noopener\"><br \/><img decoding=\"async\" src=\"\/forum\/wp-content\/uploads\/forum-uploads\/760\/J2X7FJOR5Q0U.png\" alt=\"image.png\"><br \/><\/a><\/div>\n<\/div>\n<\/div>\n","protected":false},"template":"","class_list":["post-164928","topic","type-topic","status-closed","hentry"],"aioseo_notices":[],"aioseo_head":"\n\t\t<!-- All in One SEO 4.9.10 - aioseo.com -->\n\t<meta name=\"description\" content=\"\u8001\u5e08\uff0c\u60a8\u597d\uff01\u7f51\u5740\uff1ahttps:\/\/support.lumerical.com\/hc\/en-us\/articles\/360041781874-Photolithographic-projection-to-photoresist \u6211\u5728\u4e0a\u9762\u7f51\u5740\u5904\u7684\u4f8b\u5b50\u4e2d\u53d1\u73b0\uff0c\u5176\u811a\u672c\u4f7f\u7528grating\u51fd\u6570\u83b7\u5f97\u4e8699.83um\u5904\u573a\u5f3a\u5206\u5e03\uff0c\u8be5\u573a\u5f3a\u5206\u5e03\u53ef\u4ee5\u8ba4\u4e3a\u662f99.83um\u5904\u7684\u8fdc\u573a\u5206\u5e03\u5417\uff1f\u8fd9\u4e2a\u7ed3\u679c\u4e0e\u7528grating transmission\u5206\u6790\u7ec4\u83b7\u5f97T_grating\u884d\u5c04\u7ea7\u6570\u5206\u5e03\u6709\u4f55\u533a\u522b\u5462?\u6839\u636e\u60a8\u4ee5\u524d\u8bf4\u6cd5\uff0c\u65e0\u9650\u5468\u671f\u6a21\u578b\u65e0\u6cd5\u83b7\u5f97\u8fdc\u573a\u5206\u5e03\u56fe\u6837\uff1f\u6240\u4ee5\u73b0\u5728\u5bf9\u4ee5\u4e0a\u95ee\u9898\u6bd4\u8f83\u8ff7\u60d1\uff0c\u8bf7\u60a8\u5e2e\u5fd9\u56de\u7b54\u3002\" \/>\n\t<meta name=\"robots\" content=\"max-image-preview:large\" \/>\n\t<link rel=\"canonical\" href=\"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\/\" \/>\n\t<meta name=\"generator\" content=\"All in One SEO (AIOSEO) 4.9.10\" \/>\n\t\t<meta property=\"og:locale\" content=\"en_US\" \/>\n\t\t<meta property=\"og:site_name\" content=\"Ansys Learning Forum | Ansys Innovation Space\" \/>\n\t\t<meta property=\"og:type\" content=\"article\" \/>\n\t\t<meta property=\"og:title\" content=\"\u5468\u671f\u6a21\u578b\u5982\u4f55\u83b7\u5f97\u4e0d\u540c\u8ddd\u79bb\u7684\u8fdc\u573a\u5206\u5e03\uff1f | Ansys Learning Forum\" \/>\n\t\t<meta property=\"og:description\" content=\"\u8001\u5e08\uff0c\u60a8\u597d\uff01\u7f51\u5740\uff1ahttps:\/\/support.lumerical.com\/hc\/en-us\/articles\/360041781874-Photolithographic-projection-to-photoresist \u6211\u5728\u4e0a\u9762\u7f51\u5740\u5904\u7684\u4f8b\u5b50\u4e2d\u53d1\u73b0\uff0c\u5176\u811a\u672c\u4f7f\u7528grating\u51fd\u6570\u83b7\u5f97\u4e8699.83um\u5904\u573a\u5f3a\u5206\u5e03\uff0c\u8be5\u573a\u5f3a\u5206\u5e03\u53ef\u4ee5\u8ba4\u4e3a\u662f99.83um\u5904\u7684\u8fdc\u573a\u5206\u5e03\u5417\uff1f\u8fd9\u4e2a\u7ed3\u679c\u4e0e\u7528grating transmission\u5206\u6790\u7ec4\u83b7\u5f97T_grating\u884d\u5c04\u7ea7\u6570\u5206\u5e03\u6709\u4f55\u533a\u522b\u5462?\u6839\u636e\u60a8\u4ee5\u524d\u8bf4\u6cd5\uff0c\u65e0\u9650\u5468\u671f\u6a21\u578b\u65e0\u6cd5\u83b7\u5f97\u8fdc\u573a\u5206\u5e03\u56fe\u6837\uff1f\u6240\u4ee5\u73b0\u5728\u5bf9\u4ee5\u4e0a\u95ee\u9898\u6bd4\u8f83\u8ff7\u60d1\uff0c\u8bf7\u60a8\u5e2e\u5fd9\u56de\u7b54\u3002\" \/>\n\t\t<meta property=\"og:url\" content=\"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\/\" \/>\n\t\t<meta property=\"og:image\" content=\"https:\/\/innovationspace.ansys.com\/forum\/forum\/wp-content\/uploads\/forum-uploads\/760\/J2X7FJOR5Q0U.png\" \/>\n\t\t<meta property=\"og:image:secure_url\" content=\"https:\/\/innovationspace.ansys.com\/forum\/forum\/wp-content\/uploads\/forum-uploads\/760\/J2X7FJOR5Q0U.png\" \/>\n\t\t<meta property=\"article:published_time\" content=\"2021-12-17T10:03:14+00:00\" \/>\n\t\t<meta property=\"article:modified_time\" content=\"2022-07-28T10:21:47+00:00\" \/>\n\t\t<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n\t\t<meta name=\"twitter:title\" content=\"\u5468\u671f\u6a21\u578b\u5982\u4f55\u83b7\u5f97\u4e0d\u540c\u8ddd\u79bb\u7684\u8fdc\u573a\u5206\u5e03\uff1f | Ansys Learning Forum\" \/>\n\t\t<meta name=\"twitter:description\" content=\"\u8001\u5e08\uff0c\u60a8\u597d\uff01\u7f51\u5740\uff1ahttps:\/\/support.lumerical.com\/hc\/en-us\/articles\/360041781874-Photolithographic-projection-to-photoresist \u6211\u5728\u4e0a\u9762\u7f51\u5740\u5904\u7684\u4f8b\u5b50\u4e2d\u53d1\u73b0\uff0c\u5176\u811a\u672c\u4f7f\u7528grating\u51fd\u6570\u83b7\u5f97\u4e8699.83um\u5904\u573a\u5f3a\u5206\u5e03\uff0c\u8be5\u573a\u5f3a\u5206\u5e03\u53ef\u4ee5\u8ba4\u4e3a\u662f99.83um\u5904\u7684\u8fdc\u573a\u5206\u5e03\u5417\uff1f\u8fd9\u4e2a\u7ed3\u679c\u4e0e\u7528grating transmission\u5206\u6790\u7ec4\u83b7\u5f97T_grating\u884d\u5c04\u7ea7\u6570\u5206\u5e03\u6709\u4f55\u533a\u522b\u5462?\u6839\u636e\u60a8\u4ee5\u524d\u8bf4\u6cd5\uff0c\u65e0\u9650\u5468\u671f\u6a21\u578b\u65e0\u6cd5\u83b7\u5f97\u8fdc\u573a\u5206\u5e03\u56fe\u6837\uff1f\u6240\u4ee5\u73b0\u5728\u5bf9\u4ee5\u4e0a\u95ee\u9898\u6bd4\u8f83\u8ff7\u60d1\uff0c\u8bf7\u60a8\u5e2e\u5fd9\u56de\u7b54\u3002\" \/>\n\t\t<meta name=\"twitter:image\" content=\"https:\/\/innovationspace.ansys.com\/forum\/forum\/wp-content\/uploads\/forum-uploads\/760\/J2X7FJOR5Q0U.png\" \/>\n\t\t<script type=\"application\/ld+json\" class=\"aioseo-schema\">\n\t\t\t{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/topic\\\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\\\/#breadcrumblist\",\"itemListElement\":[{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum#listItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\",\"nextItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/topics\\\/#listItem\",\"name\":\"Topics\"}},{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/topics\\\/#listItem\",\"position\":2,\"name\":\"Topics\",\"item\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/topics\\\/\",\"nextItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/topic\\\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\\\/#listItem\",\"name\":\"\\u5468\\u671f\\u6a21\\u578b\\u5982\\u4f55\\u83b7\\u5f97\\u4e0d\\u540c\\u8ddd\\u79bb\\u7684\\u8fdc\\u573a\\u5206\\u5e03\\uff1f\"},\"previousItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum#listItem\",\"name\":\"Home\"}},{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/topic\\\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\\\/#listItem\",\"position\":3,\"name\":\"\\u5468\\u671f\\u6a21\\u578b\\u5982\\u4f55\\u83b7\\u5f97\\u4e0d\\u540c\\u8ddd\\u79bb\\u7684\\u8fdc\\u573a\\u5206\\u5e03\\uff1f\",\"previousItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/topics\\\/#listItem\",\"name\":\"Topics\"}}]},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/#organization\",\"name\":\"Ansys Learning Forum\",\"description\":\"Ansys Innovation Space\",\"url\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/\"},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/topic\\\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\\\/#webpage\",\"url\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/topic\\\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\\\/\",\"name\":\"\\u5468\\u671f\\u6a21\\u578b\\u5982\\u4f55\\u83b7\\u5f97\\u4e0d\\u540c\\u8ddd\\u79bb\\u7684\\u8fdc\\u573a\\u5206\\u5e03\\uff1f | Ansys Learning Forum\",\"description\":\"\\u8001\\u5e08\\uff0c\\u60a8\\u597d\\uff01\\u7f51\\u5740\\uff1ahttps:\\\/\\\/support.lumerical.com\\\/hc\\\/en-us\\\/articles\\\/360041781874-Photolithographic-projection-to-photoresist \\u6211\\u5728\\u4e0a\\u9762\\u7f51\\u5740\\u5904\\u7684\\u4f8b\\u5b50\\u4e2d\\u53d1\\u73b0\\uff0c\\u5176\\u811a\\u672c\\u4f7f\\u7528grating\\u51fd\\u6570\\u83b7\\u5f97\\u4e8699.83um\\u5904\\u573a\\u5f3a\\u5206\\u5e03\\uff0c\\u8be5\\u573a\\u5f3a\\u5206\\u5e03\\u53ef\\u4ee5\\u8ba4\\u4e3a\\u662f99.83um\\u5904\\u7684\\u8fdc\\u573a\\u5206\\u5e03\\u5417\\uff1f\\u8fd9\\u4e2a\\u7ed3\\u679c\\u4e0e\\u7528grating transmission\\u5206\\u6790\\u7ec4\\u83b7\\u5f97T_grating\\u884d\\u5c04\\u7ea7\\u6570\\u5206\\u5e03\\u6709\\u4f55\\u533a\\u522b\\u5462?\\u6839\\u636e\\u60a8\\u4ee5\\u524d\\u8bf4\\u6cd5\\uff0c\\u65e0\\u9650\\u5468\\u671f\\u6a21\\u578b\\u65e0\\u6cd5\\u83b7\\u5f97\\u8fdc\\u573a\\u5206\\u5e03\\u56fe\\u6837\\uff1f\\u6240\\u4ee5\\u73b0\\u5728\\u5bf9\\u4ee5\\u4e0a\\u95ee\\u9898\\u6bd4\\u8f83\\u8ff7\\u60d1\\uff0c\\u8bf7\\u60a8\\u5e2e\\u5fd9\\u56de\\u7b54\\u3002\",\"inLanguage\":\"en-US\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/#website\"},\"breadcrumb\":{\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/topic\\\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\\\/#breadcrumblist\"},\"datePublished\":\"2021-12-17T10:03:14+00:00\",\"dateModified\":\"2022-07-28T10:21:47+00:00\"},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/#website\",\"url\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/\",\"name\":\"Ansys Learning Forum\",\"description\":\"Ansys Innovation Space\",\"inLanguage\":\"en-US\",\"publisher\":{\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/#organization\"}}]}\n\t\t<\/script>\n\t\t<!-- All in One SEO -->\n\n","aioseo_head_json":{"title":"\u5468\u671f\u6a21\u578b\u5982\u4f55\u83b7\u5f97\u4e0d\u540c\u8ddd\u79bb\u7684\u8fdc\u573a\u5206\u5e03\uff1f | Ansys Learning Forum","description":"\u8001\u5e08\uff0c\u60a8\u597d\uff01\u7f51\u5740\uff1ahttps:\/\/support.lumerical.com\/hc\/en-us\/articles\/360041781874-Photolithographic-projection-to-photoresist \u6211\u5728\u4e0a\u9762\u7f51\u5740\u5904\u7684\u4f8b\u5b50\u4e2d\u53d1\u73b0\uff0c\u5176\u811a\u672c\u4f7f\u7528grating\u51fd\u6570\u83b7\u5f97\u4e8699.83um\u5904\u573a\u5f3a\u5206\u5e03\uff0c\u8be5\u573a\u5f3a\u5206\u5e03\u53ef\u4ee5\u8ba4\u4e3a\u662f99.83um\u5904\u7684\u8fdc\u573a\u5206\u5e03\u5417\uff1f\u8fd9\u4e2a\u7ed3\u679c\u4e0e\u7528grating transmission\u5206\u6790\u7ec4\u83b7\u5f97T_grating\u884d\u5c04\u7ea7\u6570\u5206\u5e03\u6709\u4f55\u533a\u522b\u5462?\u6839\u636e\u60a8\u4ee5\u524d\u8bf4\u6cd5\uff0c\u65e0\u9650\u5468\u671f\u6a21\u578b\u65e0\u6cd5\u83b7\u5f97\u8fdc\u573a\u5206\u5e03\u56fe\u6837\uff1f\u6240\u4ee5\u73b0\u5728\u5bf9\u4ee5\u4e0a\u95ee\u9898\u6bd4\u8f83\u8ff7\u60d1\uff0c\u8bf7\u60a8\u5e2e\u5fd9\u56de\u7b54\u3002","canonical_url":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\/","robots":"max-image-preview:large","keywords":"","webmasterTools":{"miscellaneous":""},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"BreadcrumbList","@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\/#breadcrumblist","itemListElement":[{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum#listItem","position":1,"name":"Home","item":"https:\/\/innovationspace.ansys.com\/forum","nextItem":{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum\/topics\/#listItem","name":"Topics"}},{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum\/topics\/#listItem","position":2,"name":"Topics","item":"https:\/\/innovationspace.ansys.com\/forum\/topics\/","nextItem":{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\/#listItem","name":"\u5468\u671f\u6a21\u578b\u5982\u4f55\u83b7\u5f97\u4e0d\u540c\u8ddd\u79bb\u7684\u8fdc\u573a\u5206\u5e03\uff1f"},"previousItem":{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum#listItem","name":"Home"}},{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\/#listItem","position":3,"name":"\u5468\u671f\u6a21\u578b\u5982\u4f55\u83b7\u5f97\u4e0d\u540c\u8ddd\u79bb\u7684\u8fdc\u573a\u5206\u5e03\uff1f","previousItem":{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum\/topics\/#listItem","name":"Topics"}}]},{"@type":"Organization","@id":"https:\/\/innovationspace.ansys.com\/forum\/#organization","name":"Ansys Learning Forum","description":"Ansys Innovation Space","url":"https:\/\/innovationspace.ansys.com\/forum\/"},{"@type":"WebPage","@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\/#webpage","url":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\/","name":"\u5468\u671f\u6a21\u578b\u5982\u4f55\u83b7\u5f97\u4e0d\u540c\u8ddd\u79bb\u7684\u8fdc\u573a\u5206\u5e03\uff1f | Ansys Learning Forum","description":"\u8001\u5e08\uff0c\u60a8\u597d\uff01\u7f51\u5740\uff1ahttps:\/\/support.lumerical.com\/hc\/en-us\/articles\/360041781874-Photolithographic-projection-to-photoresist \u6211\u5728\u4e0a\u9762\u7f51\u5740\u5904\u7684\u4f8b\u5b50\u4e2d\u53d1\u73b0\uff0c\u5176\u811a\u672c\u4f7f\u7528grating\u51fd\u6570\u83b7\u5f97\u4e8699.83um\u5904\u573a\u5f3a\u5206\u5e03\uff0c\u8be5\u573a\u5f3a\u5206\u5e03\u53ef\u4ee5\u8ba4\u4e3a\u662f99.83um\u5904\u7684\u8fdc\u573a\u5206\u5e03\u5417\uff1f\u8fd9\u4e2a\u7ed3\u679c\u4e0e\u7528grating transmission\u5206\u6790\u7ec4\u83b7\u5f97T_grating\u884d\u5c04\u7ea7\u6570\u5206\u5e03\u6709\u4f55\u533a\u522b\u5462?\u6839\u636e\u60a8\u4ee5\u524d\u8bf4\u6cd5\uff0c\u65e0\u9650\u5468\u671f\u6a21\u578b\u65e0\u6cd5\u83b7\u5f97\u8fdc\u573a\u5206\u5e03\u56fe\u6837\uff1f\u6240\u4ee5\u73b0\u5728\u5bf9\u4ee5\u4e0a\u95ee\u9898\u6bd4\u8f83\u8ff7\u60d1\uff0c\u8bf7\u60a8\u5e2e\u5fd9\u56de\u7b54\u3002","inLanguage":"en-US","isPartOf":{"@id":"https:\/\/innovationspace.ansys.com\/forum\/#website"},"breadcrumb":{"@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\/#breadcrumblist"},"datePublished":"2021-12-17T10:03:14+00:00","dateModified":"2022-07-28T10:21:47+00:00"},{"@type":"WebSite","@id":"https:\/\/innovationspace.ansys.com\/forum\/#website","url":"https:\/\/innovationspace.ansys.com\/forum\/","name":"Ansys Learning Forum","description":"Ansys Innovation Space","inLanguage":"en-US","publisher":{"@id":"https:\/\/innovationspace.ansys.com\/forum\/#organization"}}]},"og:locale":"en_US","og:site_name":"Ansys Learning Forum | Ansys Innovation Space","og:type":"article","og:title":"\u5468\u671f\u6a21\u578b\u5982\u4f55\u83b7\u5f97\u4e0d\u540c\u8ddd\u79bb\u7684\u8fdc\u573a\u5206\u5e03\uff1f | Ansys Learning Forum","og:description":"\u8001\u5e08\uff0c\u60a8\u597d\uff01\u7f51\u5740\uff1ahttps:\/\/support.lumerical.com\/hc\/en-us\/articles\/360041781874-Photolithographic-projection-to-photoresist \u6211\u5728\u4e0a\u9762\u7f51\u5740\u5904\u7684\u4f8b\u5b50\u4e2d\u53d1\u73b0\uff0c\u5176\u811a\u672c\u4f7f\u7528grating\u51fd\u6570\u83b7\u5f97\u4e8699.83um\u5904\u573a\u5f3a\u5206\u5e03\uff0c\u8be5\u573a\u5f3a\u5206\u5e03\u53ef\u4ee5\u8ba4\u4e3a\u662f99.83um\u5904\u7684\u8fdc\u573a\u5206\u5e03\u5417\uff1f\u8fd9\u4e2a\u7ed3\u679c\u4e0e\u7528grating transmission\u5206\u6790\u7ec4\u83b7\u5f97T_grating\u884d\u5c04\u7ea7\u6570\u5206\u5e03\u6709\u4f55\u533a\u522b\u5462?\u6839\u636e\u60a8\u4ee5\u524d\u8bf4\u6cd5\uff0c\u65e0\u9650\u5468\u671f\u6a21\u578b\u65e0\u6cd5\u83b7\u5f97\u8fdc\u573a\u5206\u5e03\u56fe\u6837\uff1f\u6240\u4ee5\u73b0\u5728\u5bf9\u4ee5\u4e0a\u95ee\u9898\u6bd4\u8f83\u8ff7\u60d1\uff0c\u8bf7\u60a8\u5e2e\u5fd9\u56de\u7b54\u3002","og:url":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\/","og:image":"https:\/\/innovationspace.ansys.com\/forum\/forum\/wp-content\/uploads\/forum-uploads\/760\/J2X7FJOR5Q0U.png","og:image:secure_url":"https:\/\/innovationspace.ansys.com\/forum\/forum\/wp-content\/uploads\/forum-uploads\/760\/J2X7FJOR5Q0U.png","article:published_time":"2021-12-17T10:03:14+00:00","article:modified_time":"2022-07-28T10:21:47+00:00","twitter:card":"summary_large_image","twitter:title":"\u5468\u671f\u6a21\u578b\u5982\u4f55\u83b7\u5f97\u4e0d\u540c\u8ddd\u79bb\u7684\u8fdc\u573a\u5206\u5e03\uff1f | Ansys Learning Forum","twitter:description":"\u8001\u5e08\uff0c\u60a8\u597d\uff01\u7f51\u5740\uff1ahttps:\/\/support.lumerical.com\/hc\/en-us\/articles\/360041781874-Photolithographic-projection-to-photoresist \u6211\u5728\u4e0a\u9762\u7f51\u5740\u5904\u7684\u4f8b\u5b50\u4e2d\u53d1\u73b0\uff0c\u5176\u811a\u672c\u4f7f\u7528grating\u51fd\u6570\u83b7\u5f97\u4e8699.83um\u5904\u573a\u5f3a\u5206\u5e03\uff0c\u8be5\u573a\u5f3a\u5206\u5e03\u53ef\u4ee5\u8ba4\u4e3a\u662f99.83um\u5904\u7684\u8fdc\u573a\u5206\u5e03\u5417\uff1f\u8fd9\u4e2a\u7ed3\u679c\u4e0e\u7528grating transmission\u5206\u6790\u7ec4\u83b7\u5f97T_grating\u884d\u5c04\u7ea7\u6570\u5206\u5e03\u6709\u4f55\u533a\u522b\u5462?\u6839\u636e\u60a8\u4ee5\u524d\u8bf4\u6cd5\uff0c\u65e0\u9650\u5468\u671f\u6a21\u578b\u65e0\u6cd5\u83b7\u5f97\u8fdc\u573a\u5206\u5e03\u56fe\u6837\uff1f\u6240\u4ee5\u73b0\u5728\u5bf9\u4ee5\u4e0a\u95ee\u9898\u6bd4\u8f83\u8ff7\u60d1\uff0c\u8bf7\u60a8\u5e2e\u5fd9\u56de\u7b54\u3002","twitter:image":"https:\/\/innovationspace.ansys.com\/forum\/forum\/wp-content\/uploads\/forum-uploads\/760\/J2X7FJOR5Q0U.png"},"aioseo_meta_data":{"post_id":"164928","title":null,"description":null,"keywords":null,"keyphrases":null,"primary_term":null,"canonical_url":null,"og_title":null,"og_description":null,"og_object_type":"default","og_image_type":"content","og_image_url":null,"og_image_width":null,"og_image_height":null,"og_image_custom_url":null,"og_image_custom_fields":null,"og_video":null,"og_custom_url":null,"og_article_section":null,"og_article_tags":null,"twitter_use_og":true,"twitter_card":"default","twitter_image_type":"default","twitter_image_url":null,"twitter_image_custom_url":null,"twitter_image_custom_fields":null,"twitter_title":null,"twitter_description":null,"schema":{"blockGraphs":[],"customGraphs":[],"default":{"data":{"Article":[],"Course":[],"Dataset":[],"FAQPage":[],"Movie":[],"Person":[],"Product":[],"ProductReview":[],"Car":[],"Recipe":[],"Service":[],"SoftwareApplication":[],"WebPage":[]},"graphName":"","isEnabled":true},"graphs":[]},"schema_type":"default","schema_type_options":null,"pillar_content":false,"robots_default":true,"robots_noindex":false,"robots_noarchive":false,"robots_nosnippet":false,"robots_nofollow":false,"robots_noimageindex":false,"robots_noodp":false,"robots_notranslate":false,"robots_max_snippet":null,"robots_max_videopreview":null,"robots_max_imagepreview":"large","priority":null,"frequency":null,"local_seo":null,"limit_modified_date":false,"created":"2024-10-28 20:22:52","updated":"2024-10-28 20:22:52","ai":null,"breadcrumb_settings":null,"seo_analyzer_scan_date":null},"aioseo_breadcrumb":"<div class=\"aioseo-breadcrumbs\"><span class=\"aioseo-breadcrumb\">\n\t\t\t<a href=\"https:\/\/innovationspace.ansys.com\/forum\" title=\"Home\">Home<\/a>\n\t\t<\/span><span class=\"aioseo-breadcrumb-separator\">&raquo;<\/span><span class=\"aioseo-breadcrumb\">\n\t\t\t<a href=\"https:\/\/innovationspace.ansys.com\/forum\/topics\/\" title=\"Topics\">Topics<\/a>\n\t\t<\/span><span class=\"aioseo-breadcrumb-separator\">&raquo;<\/span><span class=\"aioseo-breadcrumb\">\n\t\t\t\u5468\u671f\u6a21\u578b\u5982\u4f55\u83b7\u5f97\u4e0d\u540c\u8ddd\u79bb\u7684\u8fdc\u573a\u5206\u5e03\uff1f\n\t\t<\/span><\/div>","aioseo_breadcrumb_json":[{"label":"Home","link":"https:\/\/innovationspace.ansys.com\/forum"},{"label":"Topics","link":"https:\/\/innovationspace.ansys.com\/forum\/topics\/"},{"label":"\u5468\u671f\u6a21\u578b\u5982\u4f55\u83b7\u5f97\u4e0d\u540c\u8ddd\u79bb\u7684\u8fdc\u573a\u5206\u5e03\uff1f","link":"https:\/\/innovationspace.ansys.com\/forum\/forums\/topic\/zhouqimoxingruhehuodebutongjulideyuanchangfenbu\/"}],"acf":[],"custom_fields":[{"0":{"_bbp_author_ip":[""],"_bbp_old_reply_author_name_id":["Anonymous"],"_bbp_old_is_reply_anonymous_id":["false"],"_btv_view_count":["929"],"_bbp_likes_count":["0"],"_edit_lock":["1659004087:76739"],"_edit_last":["76739"],"_wp_old_slug":["ZhouQiMoXingRuHeHuoDeBuTongJuLiDeYuanChangFenBu"],"_bbp_topic_status":["unanswered"],"_bbp_status":["publish"],"_bbp_topic_id":["164928"],"_bbp_forum_id":["27835"],"_bbp_engagement":["2592","76177"],"_bbp_voice_count":["2"],"_bbp_reply_count":["10"],"_bbp_last_reply_id":["200707"],"_bbp_last_active_id":["200707"],"_bbp_last_active_time":["2022-01-18 18:52:30"]},"test":"liulqvisionox-com"}],"_links":{"self":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/topics\/164928","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/topics"}],"about":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/types\/topic"}],"version-history":[{"count":0,"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/topics\/164928\/revisions"}],"wp:attachment":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/media?parent=164928"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}