


{"id":320349,"date":"2023-11-30T18:28:45","date_gmt":"2023-11-30T18:28:45","guid":{"rendered":"\/forum\/forums\/reply\/320349\/"},"modified":"2023-11-30T18:28:45","modified_gmt":"2023-11-30T18:28:45","slug":"320349","status":"publish","type":"reply","link":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/320349\/","title":{"rendered":"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL."},"content":{"rendered":"<p>&lt;p&gt;Do you want to do an electrostatic analysis or an electrostatic-structural analysis?&nbsp; If you want to do an electrostatic analysis, then you need to model the air around the comb using electrostatic elements (e.g., SOLID122) to calculate the electric field and maybe CMATRIX to extract the capacitance. If you want to do an electrostatic-structural analysis, you could use the coupled-field 22x elements, but you might want to consider using the TRANS126 element.&nbsp; TRANS126 was originally designed to model comb drives.&nbsp; You should review Section 2.9 in the MAPDL Coupled-Field Analysis Guide.&lt;\/p&gt;<\/p>\n","protected":false},"template":"","class_list":["post-320349","reply","type-reply","status-publish","hentry"],"aioseo_notices":[],"aioseo_head":"\n\t\t<!-- All in One SEO 4.9.10 - aioseo.com -->\n\t<meta name=\"description\" content=\"Do you want to do an electrostatic analysis or an electrostatic-structural analysis? If you want to do an electrostatic analysis, then you need to model the air around the comb using electrostatic elements (e.g., SOLID122) to calculate the electric field and maybe CMATRIX to extract the capacitance. If you want to do an electrostatic-structural analysis,\" \/>\n\t<meta name=\"robots\" content=\"max-image-preview:large\" \/>\n\t<link rel=\"canonical\" href=\"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/320349\/\" \/>\n\t<meta name=\"generator\" content=\"All in One SEO (AIOSEO) 4.9.10\" \/>\n\t\t<meta property=\"og:locale\" content=\"en_US\" \/>\n\t\t<meta property=\"og:site_name\" content=\"Ansys Learning Forum | Ansys Innovation Space\" \/>\n\t\t<meta property=\"og:type\" content=\"article\" \/>\n\t\t<meta property=\"og:title\" content=\"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL. | Ansys Learning Forum\" \/>\n\t\t<meta property=\"og:description\" content=\"Do you want to do an electrostatic analysis or an electrostatic-structural analysis? If you want to do an electrostatic analysis, then you need to model the air around the comb using electrostatic elements (e.g., SOLID122) to calculate the electric field and maybe CMATRIX to extract the capacitance. If you want to do an electrostatic-structural analysis,\" \/>\n\t\t<meta property=\"og:url\" content=\"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/320349\/\" \/>\n\t\t<meta property=\"article:published_time\" content=\"2023-11-30T18:28:45+00:00\" \/>\n\t\t<meta property=\"article:modified_time\" content=\"2023-11-30T18:28:45+00:00\" \/>\n\t\t<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n\t\t<meta name=\"twitter:title\" content=\"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL. | Ansys Learning Forum\" \/>\n\t\t<meta name=\"twitter:description\" content=\"Do you want to do an electrostatic analysis or an electrostatic-structural analysis? If you want to do an electrostatic analysis, then you need to model the air around the comb using electrostatic elements (e.g., SOLID122) to calculate the electric field and maybe CMATRIX to extract the capacitance. If you want to do an electrostatic-structural analysis,\" \/>\n\t\t<script type=\"application\/ld+json\" class=\"aioseo-schema\">\n\t\t\t{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/reply\\\/320349\\\/#breadcrumblist\",\"itemListElement\":[{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum#listItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\",\"nextItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/reply\\\/320349\\\/#listItem\",\"name\":\"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL.\"}},{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/reply\\\/320349\\\/#listItem\",\"position\":2,\"name\":\"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL.\",\"previousItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum#listItem\",\"name\":\"Home\"}}]},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/#organization\",\"name\":\"Ansys Learning Forum\",\"description\":\"Ansys Innovation Space\",\"url\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/\"},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/reply\\\/320349\\\/#webpage\",\"url\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/reply\\\/320349\\\/\",\"name\":\"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL. | Ansys Learning Forum\",\"description\":\"Do you want to do an electrostatic analysis or an electrostatic-structural analysis? If you want to do an electrostatic analysis, then you need to model the air around the comb using electrostatic elements (e.g., SOLID122) to calculate the electric field and maybe CMATRIX to extract the capacitance. If you want to do an electrostatic-structural analysis,\",\"inLanguage\":\"en-US\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/#website\"},\"breadcrumb\":{\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/reply\\\/320349\\\/#breadcrumblist\"},\"datePublished\":\"2023-11-30T18:28:45+00:00\",\"dateModified\":\"2023-11-30T18:28:45+00:00\"},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/#website\",\"url\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/\",\"name\":\"Ansys Learning Forum\",\"description\":\"Ansys Innovation Space\",\"inLanguage\":\"en-US\",\"publisher\":{\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/#organization\"}}]}\n\t\t<\/script>\n\t\t<!-- All in One SEO -->\n\n","aioseo_head_json":{"title":"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL. | Ansys Learning Forum","description":"Do you want to do an electrostatic analysis or an electrostatic-structural analysis? If you want to do an electrostatic analysis, then you need to model the air around the comb using electrostatic elements (e.g., SOLID122) to calculate the electric field and maybe CMATRIX to extract the capacitance. If you want to do an electrostatic-structural analysis,","canonical_url":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/320349\/","robots":"max-image-preview:large","keywords":"","webmasterTools":{"miscellaneous":""},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"BreadcrumbList","@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/320349\/#breadcrumblist","itemListElement":[{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum#listItem","position":1,"name":"Home","item":"https:\/\/innovationspace.ansys.com\/forum","nextItem":{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/320349\/#listItem","name":"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL."}},{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/320349\/#listItem","position":2,"name":"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL.","previousItem":{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum#listItem","name":"Home"}}]},{"@type":"Organization","@id":"https:\/\/innovationspace.ansys.com\/forum\/#organization","name":"Ansys Learning Forum","description":"Ansys Innovation Space","url":"https:\/\/innovationspace.ansys.com\/forum\/"},{"@type":"WebPage","@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/320349\/#webpage","url":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/320349\/","name":"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL. | Ansys Learning Forum","description":"Do you want to do an electrostatic analysis or an electrostatic-structural analysis? If you want to do an electrostatic analysis, then you need to model the air around the comb using electrostatic elements (e.g., SOLID122) to calculate the electric field and maybe CMATRIX to extract the capacitance. If you want to do an electrostatic-structural analysis,","inLanguage":"en-US","isPartOf":{"@id":"https:\/\/innovationspace.ansys.com\/forum\/#website"},"breadcrumb":{"@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/320349\/#breadcrumblist"},"datePublished":"2023-11-30T18:28:45+00:00","dateModified":"2023-11-30T18:28:45+00:00"},{"@type":"WebSite","@id":"https:\/\/innovationspace.ansys.com\/forum\/#website","url":"https:\/\/innovationspace.ansys.com\/forum\/","name":"Ansys Learning Forum","description":"Ansys Innovation Space","inLanguage":"en-US","publisher":{"@id":"https:\/\/innovationspace.ansys.com\/forum\/#organization"}}]},"og:locale":"en_US","og:site_name":"Ansys Learning Forum | Ansys Innovation Space","og:type":"article","og:title":"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL. | Ansys Learning Forum","og:description":"Do you want to do an electrostatic analysis or an electrostatic-structural analysis? If you want to do an electrostatic analysis, then you need to model the air around the comb using electrostatic elements (e.g., SOLID122) to calculate the electric field and maybe CMATRIX to extract the capacitance. If you want to do an electrostatic-structural analysis,","og:url":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/320349\/","article:published_time":"2023-11-30T18:28:45+00:00","article:modified_time":"2023-11-30T18:28:45+00:00","twitter:card":"summary_large_image","twitter:title":"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL. | Ansys Learning Forum","twitter:description":"Do you want to do an electrostatic analysis or an electrostatic-structural analysis? If you want to do an electrostatic analysis, then you need to model the air around the comb using electrostatic elements (e.g., SOLID122) to calculate the electric field and maybe CMATRIX to extract the capacitance. If you want to do an electrostatic-structural analysis,"},"aioseo_meta_data":{"post_id":"320349","title":null,"description":null,"keywords":null,"keyphrases":null,"primary_term":null,"canonical_url":null,"og_title":null,"og_description":null,"og_object_type":"default","og_image_type":"content","og_image_url":null,"og_image_width":null,"og_image_height":null,"og_image_custom_url":null,"og_image_custom_fields":null,"og_video":null,"og_custom_url":null,"og_article_section":null,"og_article_tags":null,"twitter_use_og":true,"twitter_card":"default","twitter_image_type":"default","twitter_image_url":null,"twitter_image_custom_url":null,"twitter_image_custom_fields":null,"twitter_title":null,"twitter_description":null,"schema":{"blockGraphs":[],"customGraphs":[],"default":{"data":{"Article":[],"Course":[],"Dataset":[],"FAQPage":[],"Movie":[],"Person":[],"Product":[],"ProductReview":[],"Car":[],"Recipe":[],"Service":[],"SoftwareApplication":[],"WebPage":[]},"graphName":"","isEnabled":true},"graphs":[]},"schema_type":"default","schema_type_options":null,"pillar_content":false,"robots_default":true,"robots_noindex":false,"robots_noarchive":false,"robots_nosnippet":false,"robots_nofollow":false,"robots_noimageindex":false,"robots_noodp":false,"robots_notranslate":false,"robots_max_snippet":null,"robots_max_videopreview":null,"robots_max_imagepreview":"large","priority":null,"frequency":null,"local_seo":null,"limit_modified_date":false,"created":"2024-10-28 17:31:01","updated":"2026-08-10 12:49:25","ai":null,"breadcrumb_settings":null,"seo_analyzer_scan_date":null},"aioseo_breadcrumb":"<div class=\"aioseo-breadcrumbs\"><span class=\"aioseo-breadcrumb\">\n\t\t\t<a href=\"https:\/\/innovationspace.ansys.com\/forum\" title=\"Home\">Home<\/a>\n\t\t<\/span><span class=\"aioseo-breadcrumb-separator\">&raquo;<\/span><span class=\"aioseo-breadcrumb\">\n\t\t\tReply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL.\n\t\t<\/span><\/div>","aioseo_breadcrumb_json":[{"label":"Home","link":"https:\/\/innovationspace.ansys.com\/forum"},{"label":"Reply To: How to analyse comb electrodes used in MEMS accelerometers with MAPDL.","link":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/320349\/"}],"acf":[],"_links":{"self":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/replies\/320349","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/replies"}],"about":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/types\/reply"}],"version-history":[{"count":0,"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/replies\/320349\/revisions"}],"wp:attachment":[{"href":"https:\/\/innovationspace.ansys.com\/forum\/wp-json\/wp\/v2\/media?parent=320349"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}