


{"id":213508,"date":"2022-05-03T05:53:33","date_gmt":"2022-05-03T05:53:33","guid":{"rendered":"\/forum\/forums\/reply\/213508\/"},"modified":"2022-05-03T05:53:33","modified_gmt":"2022-05-03T05:53:33","slug":"213508","status":"publish","type":"reply","link":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/213508\/","title":{"rendered":"Reply To: \u60f3\u8bf7\u6559\u4e00\u4e2a\u95ee\u9898\uff0c\u5728\u201cPhotolithographic projection to photoresist\u201d\u4f8b\u5b50\u4e2d\uff0c\u811a\u672c\u4ee3\u7801\u8fdb\u884c\u4e86\u7535\u78c1\u573a\u7684\u4f20\u64ad\uff0c\u5728\u5176\u4e2d\u7ed9\u51fa\u4e86\u7535\u78c1\u573a\u7684\u76f8\u4e92\u5173\u7cfb\uff0c\u8bf7\u95ee\u8fd9\u4e2a\u5173\u7cfb\u662f\u5982\u4f55\u5f97\u5230\u7684\u5462"},"content":{"rendered":"<p>\u00d5\u00d1\u00a2\u00fe\u00dc\u00e4\u00b4\u255d\u00ee\u00b5\u00e4\u0192\u00de\u2591\u00f3\u00de\u00c7\u00fc\u00d5\u00a9\u00ea<\/p>\n","protected":false},"template":"","class_list":["post-213508","reply","type-reply","status-publish","hentry"],"aioseo_notices":[],"aioseo_head":"\n\t\t<!-- All in One SEO 4.9.10 - aioseo.com -->\n\t<meta name=\"description\" content=\"\u00d5\u00d1\u00a2\u00fe\u00dc\u00e4\u00b4\u255d\u00ee\u00b5\u00e4\u0192\u00de\u2591\u00f3\u00de\u00c7\u00fc\u00d5\u00a9\u00ea\" \/>\n\t<meta name=\"robots\" content=\"max-image-preview:large\" \/>\n\t<link rel=\"canonical\" href=\"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/213508\/\" 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type=\"application\/ld+json\" class=\"aioseo-schema\">\n\t\t\t{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/reply\\\/213508\\\/#breadcrumblist\",\"itemListElement\":[{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum#listItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\",\"nextItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/reply\\\/213508\\\/#listItem\",\"name\":\"Reply To: \\u60f3\\u8bf7\\u6559\\u4e00\\u4e2a\\u95ee\\u9898\\uff0c\\u5728\\u201cPhotolithographic projection to photoresist\\u201d\\u4f8b\\u5b50\\u4e2d\\uff0c\\u811a\\u672c\\u4ee3\\u7801\\u8fdb\\u884c\\u4e86\\u7535\\u78c1\\u573a\\u7684\\u4f20\\u64ad\\uff0c\\u5728\\u5176\\u4e2d\\u7ed9\\u51fa\\u4e86\\u7535\\u78c1\\u573a\\u7684\\u76f8\\u4e92\\u5173\\u7cfb\\uff0c\\u8bf7\\u95ee\\u8fd9\\u4e2a\\u5173\\u7cfb\\u662f\\u5982\\u4f55\\u5f97\\u5230\\u7684\\u5462\"}},{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/reply\\\/213508\\\/#listItem\",\"position\":2,\"name\":\"Reply To: \\u60f3\\u8bf7\\u6559\\u4e00\\u4e2a\\u95ee\\u9898\\uff0c\\u5728\\u201cPhotolithographic projection to photoresist\\u201d\\u4f8b\\u5b50\\u4e2d\\uff0c\\u811a\\u672c\\u4ee3\\u7801\\u8fdb\\u884c\\u4e86\\u7535\\u78c1\\u573a\\u7684\\u4f20\\u64ad\\uff0c\\u5728\\u5176\\u4e2d\\u7ed9\\u51fa\\u4e86\\u7535\\u78c1\\u573a\\u7684\\u76f8\\u4e92\\u5173\\u7cfb\\uff0c\\u8bf7\\u95ee\\u8fd9\\u4e2a\\u5173\\u7cfb\\u662f\\u5982\\u4f55\\u5f97\\u5230\\u7684\\u5462\",\"previousItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum#listItem\",\"name\":\"Home\"}}]},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/#organization\",\"name\":\"Ansys Learning Forum\",\"description\":\"Ansys Innovation Space\",\"url\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/\"},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/reply\\\/213508\\\/#webpage\",\"url\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/reply\\\/213508\\\/\",\"name\":\"Reply To: 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Forum\",\"description\":\"\\u00d5\\u00d1\\u00a2\\u00fe\\u00dc\\u00e4\\u00b4\\u255d\\u00ee\\u00b5\\u00e4\\u0192\\u00de\\u2591\\u00f3\\u00de\\u00c7\\u00fc\\u00d5\\u00a9\\u00ea\",\"inLanguage\":\"en-US\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/#website\"},\"breadcrumb\":{\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/forums\\\/reply\\\/213508\\\/#breadcrumblist\"},\"datePublished\":\"2022-05-03T05:53:33+00:00\",\"dateModified\":\"2022-05-03T05:53:33+00:00\"},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/#website\",\"url\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/\",\"name\":\"Ansys Learning Forum\",\"description\":\"Ansys Innovation Space\",\"inLanguage\":\"en-US\",\"publisher\":{\"@id\":\"https:\\\/\\\/innovationspace.ansys.com\\\/forum\\\/#organization\"}}]}\n\t\t<\/script>\n\t\t<!-- All in One SEO -->\n\n","aioseo_head_json":{"title":"Reply To: \u60f3\u8bf7\u6559\u4e00\u4e2a\u95ee\u9898\uff0c\u5728\u201cPhotolithographic projection to photoresist\u201d\u4f8b\u5b50\u4e2d\uff0c\u811a\u672c\u4ee3\u7801\u8fdb\u884c\u4e86\u7535\u78c1\u573a\u7684\u4f20\u64ad\uff0c\u5728\u5176\u4e2d\u7ed9\u51fa\u4e86\u7535\u78c1\u573a\u7684\u76f8\u4e92\u5173\u7cfb\uff0c\u8bf7\u95ee\u8fd9\u4e2a\u5173\u7cfb\u662f\u5982\u4f55\u5f97\u5230\u7684\u5462 | Ansys Learning Forum","description":"\u00d5\u00d1\u00a2\u00fe\u00dc\u00e4\u00b4\u255d\u00ee\u00b5\u00e4\u0192\u00de\u2591\u00f3\u00de\u00c7\u00fc\u00d5\u00a9\u00ea","canonical_url":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/213508\/","robots":"max-image-preview:large","keywords":"","webmasterTools":{"miscellaneous":""},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"BreadcrumbList","@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/213508\/#breadcrumblist","itemListElement":[{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum#listItem","position":1,"name":"Home","item":"https:\/\/innovationspace.ansys.com\/forum","nextItem":{"@type":"ListItem","@id":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/213508\/#listItem","name":"Reply To: \u60f3\u8bf7\u6559\u4e00\u4e2a\u95ee\u9898\uff0c\u5728\u201cPhotolithographic projection to 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Space","inLanguage":"en-US","publisher":{"@id":"https:\/\/innovationspace.ansys.com\/forum\/#organization"}}]},"og:locale":"en_US","og:site_name":"Ansys Learning Forum | Ansys Innovation Space","og:type":"article","og:title":"Reply To: \u60f3\u8bf7\u6559\u4e00\u4e2a\u95ee\u9898\uff0c\u5728\u201cPhotolithographic projection to photoresist\u201d\u4f8b\u5b50\u4e2d\uff0c\u811a\u672c\u4ee3\u7801\u8fdb\u884c\u4e86\u7535\u78c1\u573a\u7684\u4f20\u64ad\uff0c\u5728\u5176\u4e2d\u7ed9\u51fa\u4e86\u7535\u78c1\u573a\u7684\u76f8\u4e92\u5173\u7cfb\uff0c\u8bf7\u95ee\u8fd9\u4e2a\u5173\u7cfb\u662f\u5982\u4f55\u5f97\u5230\u7684\u5462 | Ansys Learning Forum","og:description":"\u00d5\u00d1\u00a2\u00fe\u00dc\u00e4\u00b4\u255d\u00ee\u00b5\u00e4\u0192\u00de\u2591\u00f3\u00de\u00c7\u00fc\u00d5\u00a9\u00ea","og:url":"https:\/\/innovationspace.ansys.com\/forum\/forums\/reply\/213508\/","article:published_time":"2022-05-03T05:53:33+00:00","article:modified_time":"2022-05-03T05:53:33+00:00","twitter:card":"summary_large_image","twitter:title":"Reply To: \u60f3\u8bf7\u6559\u4e00\u4e2a\u95ee\u9898\uff0c\u5728\u201cPhotolithographic projection to photoresist\u201d\u4f8b\u5b50\u4e2d\uff0c\u811a\u672c\u4ee3\u7801\u8fdb\u884c\u4e86\u7535\u78c1\u573a\u7684\u4f20\u64ad\uff0c\u5728\u5176\u4e2d\u7ed9\u51fa\u4e86\u7535\u78c1\u573a\u7684\u76f8\u4e92\u5173\u7cfb\uff0c\u8bf7\u95ee\u8fd9\u4e2a\u5173\u7cfb\u662f\u5982\u4f55\u5f97\u5230\u7684\u5462 | Ansys Learning 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