Reply To: Vibration simulation analysis for chemical mechanical polishing (CMP) process

[mohan.urs]

Hey, 

Check out his video https://innovationspace.ansys.com/courses/courses/mode-superposition-transient-analysis/lessons/predicting-transient-vibrations-in-ansys-mechanical-lesson-2/ . The entire setup might not be useful but it describes how to use vibrational loads in transient analysis. 
Do explain what type of vibrational loads are acting in the CMP process as forum users might not be familiar with such processess. 

Regards,
Mohan Urs