Reply To: RMS spot size interpretation

[Ethan Keeler]

Hi Jurgen,

Just to clarify, the Merit Function as you've have set is giving you the extent of the transverse ray aberration for X and Y simultaneously, and in practive will typically represent the worst offender (larger aberration in X or in Y). In order to see a computation of the actual RMS spot radius, you should set the weight of X and Y to 0 in the Merit Function Wizzard:

You can find more information on what is being calculated here: Optimization Function Criteria.

Thanks,
Ethan