Reply To: Cinvergence of RCWA simulations

[Ruzan Sokhoyan]

Hi Guilin,

 

Thank you for your suggestion to use a lower auto-shutoff. I did use lower auto-shutoff with 10 nm mesh and saw no difference. Right now I use 10^-7. But 10^-8 yielded the same result. I also changed PML from the default 8 layers to 64 when I had 5 nm mesh, and I observed no difference.

 

Regarding RCWA, I use "tangent vector field" setting.