Dan Dvorscak
Ansys Employee

I worry that the issue here is more fundamental and due to the fact that the M3 is an ARM based processor. The Ansys Electronics suite is compiled for Intel and AMD processors only. Other architectures, such as ARM, are not officailly supported. 
That error is coming from Windows itself, and is the decimial equivalent of the hex C000001D error code which is for an "illegal instruction." Again, I fear this is due to trying to run HFSS on an unsupported CPU.Â